ZEISS FE-SEM Sigma360 DVIA-ULF700 Installation Report
Contents
Overview
Following the installation of DVIA-ULF700 at Haikou, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the IDLE state.
Data is represented in VC Curve format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ULF700
Serial Number: 260528R9
Engineer
Gyumin Park, Changhyeon Moon · DAEIL SYSTEMS
Tuning Date
2026.09.11
End User
School of Life and Health Sciences, Hainan Normal University
Number of Tuning Trial
1st
Site
Haikou
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: Sigma360
Vibration Specification
Horizontal
| Frequency [Hz] | Allowable [mm/s² RMS] |
|---|---|
| 1 | 0.04 |
| 10 | 0.04 |
| 10 | 0.17 |
| 20 | 0.17 |
| 20 | 0.3 |
| 70 | 0.3 |
| 70 | 2 |
| 100 | 2 |
Vertical
| Frequency [Hz] | Allowable [mm/s² RMS] |
|---|---|
| 1 | 0.03 |
| 8 | 0.03 |
| 8 | 0.15 |
| 45 | 0.15 |
| 45 | 2 |
| 100 | 2 |
Equipment Condition
IDLE
Tuning Request
Measurement Summary
| Measurement Point | VibrationSpecifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-ULF700 | |||
| 1. Floor 2. DVIA-ULF700 | See Section 9 | Vertical | ✓ PASS | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical
Vertical — Autospectrum
Left to Right
Left to Right — Autospectrum
Front to Back
Front to Back — Autospectrum
Installation Photo
Equipment
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
