Vibration Isolation Case Studies

DVIA-ULFB700 installation report (serial 260203R2) for a ZEISS Sigma 360 FE-SEM at End User Hubei University of Technology in Wuhan, China. Tuning on 2026.08.04 covered air pressure setting and per-axis control gain adjustment; vibration was then measured with the equipment Turned off, and both the floor and the DVIA-ULFB700 platform met the ZEISS vibration specification on all three axes (Vertical, Left to Right, Front to Back). Published figures: the tuning request work order, the per-axis Autospectrum traces captured from the UI program, and an installation photo of the installed Sigma 360.

Installation report for the DVID-C vibration isolation counter (serial 260415R2) supplied to Cosmo AM&T through Bruker Korea for a Bruker Contour X-500 optical profilometer. Vibration was measured on 5 August 2026 with the equipment installed and Turned on/IDLE, using a B&K Front End Type 3040-A-040 with a PCB 393B05 accelerometer. The floor already met VC-B, and on the DVID-C top plate the vertical (Z), left-to-right (X) and front-to-back (Y) axes all stayed below the VC-B criterion line with no peak exceeding it anywhere in the band, so every axis passed. Per-axis VC Curves and the IEST-RP-CC012.2 vibration criteria table are published.

Installation report (VOC 26-132) for the DVIA-P4000 vibration isolation system, serial 200805R3, installed under a Bruker AFM NM-VI6 on the 3rd floor of the V1 line (SR1 Building) at a Tier-1 Semiconductor Giheung site. Tuning date July 21, 2026; report written August 3, 2026. Site inspection and re-tuning were performed to resolve a recurring POS alarm on the isolator and to recover control margin under the payload loading condition. Measurement was made in the IDLE state against a 6.25 µm/s RMS (VC-D) specification from 1 to 100 Hz, using a B&K 3040-A-040 front end with Pulse Labshop 22 and a PCB 393B05 accelerometer. The floor failed the specification on the vertical axis while the DVIA-P4000 passed on all three axes. Z, X and Y axis VC Curves are published.

Hitachi High-Tech SU8600 FE-SEM DVIA-ML1000 installation report — following installation of the DVIA-ML1000 active vibration isolation platform at Wuxi, tuning and vibration measurement were performed with the equipment in the IDLE state. Measured against the horizontal and vertical allowable vibration specification, both the floor and the DVIA-ML1000 platform passed on the vertical, left-to-right, and front-to-back axes. The tuning request work-order form, per-axis Autospectrum plots, and the installation photo are published.

Yidon Technologies YF-1801 FE-SEM DVIA-ML1000 installation report — following installation at Suzhou for end user Yidong Optical Technology, the DVIA-ML1000 active vibration isolation platform was tuned and measured with the equipment in the IDLE state. Across the vertical, left-to-right, and front-to-back axes the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work-order form, per-axis Autospectrum and VC Curves plots, and the installation photo are published.

Tier-1 electronics component manufacturer Sejong P5 3F Clean Room BGA-PSP plating-thickness gauge DVIA-P2200 installation report — tuning and vibration measurement with the equipment installed and Turned off; VC-B specification met on all axes for both floor and the DVIA-P2200 platform.