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Case Studies

DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.

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1246 case studies
YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 Installation Report

YIMO TECH Thermo Fisher Scientific Apreo 2S SEM DVIA-ML1000 installation report — following installation at Shizuishan for end user Ningxia Orient Tantalum Industry Co. Ltd., the DVIA-ML1000 active vibration isolation platform meets the VC-F vibration specification (the floor fails on vertical, left-to-right, and front-to-back, while the DVIA-ML1000 platform passes all three axes). The tuning request form, per-axis VC Curves, and the installation photo are published.

Biel Crystal Manufactory Limited Raith EBPG5200 Plus E-Beam Lithography DVIA-ML3000S (260406R2-1) Installation Report

DVIA-ML3000S (S/N 260406R2-1) installation report at Biel Crystal Manufactory Limited in Huiyang, China — Raith EBPG5200 Plus E-Beam Lithography system, supplied through YIMO TECH. Published figures: the tuning request work order and the vertical / left-to-right / front-to-back Autospectrum data obtained via the UI program. The horizontal and vertical vibration specifications run from 8 µm/s RMS at 1 Hz to 12.5 µm/s RMS at 100 Hz; the Measurement Summary cites See Section 9, with all three axes PASS on both the floor and the DVIA-ML3000S platform.

Tier-1 Semiconductor Giheung ZEISS Xradia 520 Versa DVIA-ML3000 (260319R2) Installation Report

DVIA-ML3000 (260319R2) installation report at Tier-1 Semiconductor Giheung campus S1 Line, 1F laboratory — ZEISS X-ray Microscope Xradia 520 Versa. VC-C equipment spec; B&K Front End Type 3040-A-040 with Pulse Labshop22 and a PCB 393B05 accelerometer; per-axis VC Curves and Autospectrum for vertical, left-to-right, and front-to-back; standard Reference vibration criteria as a markdown table.

YIMOTECH Thermo Fisher Helios 5CX FIB-SEM DVIA-ULF1000 Installation Report

YIMOTECH (End User Citic Metal, Beijing, China) Thermo Fisher Scientific FIB-SEM Helios 5CX DVIA-ULF1000 installation report — after installation, tuning and vibration measurement were performed with the equipment in the IDLE state and represented in VC Curve format against the VC-F specification. On the DVIA-ULF1000 platform all three axes (Vertical, Left-to-Right, Front-to-Back) passed; on the floor all three axes failed. The tuning request capture, per-axis VC Curves, and an installation photo are published.

KIMM DVIA-PB2200 High-Frequency Amplification Issue Field Analysis Report (VOC26-049)

Field analysis report (VOC26-049) for the DVIA-PB2200 vibration isolation system, serial 250122R1-1, supplied to Korea Institute of Machinery & Materials (KIMM). Report written date July 7, 2026. Investigates the 28 Hz peak measured on the X axis and the resonance peaks in the 50 to 90 Hz band: on-site measurement under three floor support conditions (Levelfoot with Footmaster, Levelfoot only, Footmaster only), FEM modal analysis of the isolator table top, levelness, center of gravity and noise checks, Open-Loop frequency response function, Passive transmissibility, Autospectrum, VC Curves, Active-On data, a Passive versus Active comparison, and compliance measurements at the payload support frame, pump drive structure, chamber and isolator table top and base plate. Instrumentation: PULSE 22, impact hammer and a PCB 393B05 accelerometer. 97 figures from the report are published.

YDRICQS Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 Installation Report

YDRICQS (Quantum Science and Technology Yangtze River Delta Industrial Innovation Center, Suzhou, China) Thermo Fisher Scientific Helios 5CX FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the VC-F vibration specification on all axes (floor fails only on vertical; the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Per-axis Auto Spectrum and VC curves, the client tuning request form, and the installation photo are published.