ZEISS EVO 15 SEM DVIA-ULF700 Installation Report
Contents
Overview
Following the installation of DVIA-ULF700 at Shanghai, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the Idle state.
Data is represented in Autospectrum format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ULF700
Serial Number: 260901R1
Engineer
Taehun Kim · DAEIL SYSTEMS
Tuning Date
2026.10.15
End User
Delta Electronics
Number of Tuning Trial
1st
Site
Shanghai
Equipment
Manufacturer: ZEISS
Equipment: SEM
Model: EVO 15
Vibration Specification
Horizontal & Vertical
| Frequency [Hz] | Allowable [µm/s RMS] |
|---|---|
| 1 ~ 30 | 6 |
| 30 ~ | 12 |
Equipment Condition
Idle
Conclusion
Vibration was measured on the floor (base) and on the DVIA-ULF700 (S/N 260901R1) isolator (top) at the Delta Electronics site in Shanghai, with the ZEISS EVO 15 in the Idle state.
The isolator vibration meets the EVO 15 specification (Section 9) in all three axes. In the 1–30 Hz range, the maximum isolator vibration levels are approx. 0.31 µm/s RMS (Vertical), 0.23 µm/s RMS (Left to Right) and 0.13 µm/s RMS (Front to Back), all in the 1 Hz band. Against the 6 µm/s RMS limit, this gives a minimum safety factor of approx. 19. Above 30 Hz, the maximum is approx. 0.01 µm/s RMS against the 12 µm/s RMS limit. Measurement graphs for each axis are provided in Section 13.
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-ULF700 | |||
| 1. Floor 2. DVIA-ULF700 | See Section 9 | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical
Vertical — Autospectrum
Left to Right
Left to Right — Autospectrum
Front to Back
Front to Back — Autospectrum
Equipment Photos
Photography was not permitted at the end-user site.
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
¹ As measured in one-third octave bands of frequency over the frequency range 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
² The detail size refers to line width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
