ZEISS Sigma 360 FE-SEM DVIA-ULF700 Installation Report
Contents
Overview
Following the installation of DVIA-ULF700 at Linhai, Zhejiang, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the Idle state.
Data is represented in Autospectrum format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ULF700
Serial Number: 260902R5
Engineer
Taehun KIM · DAEIL SYSTEMS
Tuning Date
2026.10.20
End User
Xintaijia Optoelectronics
Number of Tuning Trial
1st
Site
Linhai, Zhejiang
Equipment
Manufacturer: ZEISS
Equipment: FE-SEM
Model: Sigma 360
Vibration Specification
Horizontal
| Frequency [Hz] | Allowable [mm/s² RMS] |
|---|---|
| 1 | 0.04 |
| 10 | 0.04 |
| 10 | 0.17 |
| 20 | 0.17 |
| 20 | 0.3 |
| 70 | 0.3 |
| 70 | 2 |
| 100 | 2 |
Vertical
| Frequency [Hz] | Allowable [mm/s² RMS] |
|---|---|
| 1 | 0.03 |
| 8 | 0.03 |
| 8 | 0.15 |
| 45 | 0.15 |
| 45 | 2 |
| 100 | 2 |
Equipment Condition
Idle
Tuning Request
Conclusion
The DVIA-ULF700 (S/N 260902R5) was installed and tuned at the Linhai, Zhejiang site.
A structural resonance near 10 Hz (horizontal, X-axis) from the passive section was suppressed by controller tuning. Attenuation at this frequency did not reach -20 dB; the result was accepted.
In Idle state, the floor exceeded the referenced specification (Section 9) on all axes, while the DVIA-ULF700 met it on all axes.
Note: Measured before the SEM covers were installed. A re-check is recommended after final assembly.
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-ULF700 | |||
| 1. Floor 2. DVIA-ULF700 | See Section 9 | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✗ FAIL | ✓ PASS | ||
| Front to Back | ✗ FAIL | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical
Vertical — Autospectrum
Left to Right
Left to Right — Autospectrum
Front to Back
Front to Back — Autospectrum
Installation Photo
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
