Vibration Isolation Case Studies

Installation report for the DVIF-FB-1000x2000x3000H vibration isolation platform (S/N 241001R5) in the 3rd floor cleanroom of the FST Osan plant, covering the performance verification measurement carried out after reinforcement work on the platform top plate. A LAZIN LODAS-B18 photomask blank inspection system is mounted on top. Measurement was performed with the equipment in the IDLE state against a 25 µm/s RMS (VC-B) requirement in both the horizontal and vertical directions. Before reinforcement all three axes exceeded the requirement; afterwards the vertical (Z) axis improved from 27.7 to 17.9 µm/s and the left to right (X) axis from 70.7 to 22.4 µm/s, both satisfying VC-B, while the front to back (Y) axis improved from 71.0 to 48.0 µm/s (32.4% reduction) but remained at the VC-A level. Per-axis before/after VC Curves for the DVIF-FB top plate and per-axis VC Curves measured on the upper equipment stage are published.

Thermo Fisher Scientific Talos FIB-SEM at Broadcast and Television Metrology in Wuxi, China, delivered through channel — DVIA-ML1000 installation report for the 1st tuning trial, tuned on June 5, 2026 with the equipment turned on/IDLE. Vertically the floor measured 4.62 µm/s RMS at 15.5 Hz while the DVIA-ML1000 platform stayed at 0.11 µm/s; left to right it went from 0.71 to 0.14 µm/s at 4.5 Hz and front to back from 0.58 to 0.034 µm/s at 3.5 Hz, so every axis passed on both the floor and the platform. Because Thermo Fisher Scientific issues site-specific ambient vibration requirements from its own SE-Tools site survey, the applicable specification follows that survey report. The tuning request work order and the per-axis VC Curves, Autospectrum and Transmissibility plots from the UI program are published.

Installation report for the DVIA-MB1000 (S/N 161117R3) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. A performance check was followed by vibration measurement with the equipment in the IDLE state. On the floor all three axes measured at the VC-D level, while on the DVIA-MB1000 platform the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so no additional re-tuning was required. Per-axis Autospectrum and VC Curves plus the installation photo are published.

Installation report for the DVIA-MB1000 (S/N 170619R2) supporting a SEMIRON 5000 SEM in Lab 506 at SERON Technologies, Uiwang. The platform was inspected and the vibration environment re-measured with the equipment in the IDLE state. On the floor all three axes sat at the VC-D level, while on the DVIA-MB1000 the vertical (Z), left-to-right (X) and front-to-back (Y) axes all reached VC-G, so the system was cleared for continued operation without any re-tuning. Per-axis Autospectrum and VC Curves plus the installation photo are published.

DVIA-U1000 active vibration isolation platform (serial 241217R6) supporting a ZEISS EVO 10 SEM at End User Shanghai Fasteners and Welding Materials Technology Research Institute Co., Ltd. (上海紧焊所) in Shanghai, China, reported. This is the 2nd tuning trial on the same unit: the platform was retuned on 2026.08.04 and vibration was measured with the equipment in the Turned off state. Published figures are the Chinese-language tuning request work order (调试请求书), the per-axis transmissibility traces captured from the DAEIL UI program for Vertical (Z), Left to Right (X) and Front to Back (Y), and an installation photo of the EVO 10 seated on the DVIA-U Series platform. The source report contains no vibration specification section and no pass/fail measurement summary table, so none is shown here.

Yidong Optics SEM DVIA-ML1000 installation report (2nd tuning trial, tuned 2026.07.17) — at the Suzhou site for end user Yidong Optics Co., Ltd., the DVIA-ML1000 active vibration isolation platform was re-tuned and measured with the equipment in the IDLE state. The floor registered VC-D vertically, VC-F left to right and VC-E front to back, while the DVIA-ML1000 platform reached VC-G on all three axes. The tuning request work order (调试请求书), per-axis Autospectrum and VC Curves plots, and the installation photo are published.