Case Studies

Tier-1 Semiconductor Giheung NRD K-Line 4F Hitachi In-Line SEM XF-1000 DVIA-P10000 periodic inspection (VOC26-125) — measurement performed with the equipment Turned on/IDLE; vertical and left-to-right axes PASS on both floor and platform, front-to-back floor FAIL while the DVIA-P10000 platform meets the requirement on all axes.

Korea Institute of Science and Technology (Building L0, Room 184) TESCAN Clara FE-SEM DVIA-ULFB700 installation report — a revisit inspection prompted by upper-door open/close noise. The noise was traced to the spring contacting the top-plate groove with no impact on performance, and all X/Y/Z axes met the required vibration specification. Per-axis Autospectrum and VC curves are published.

Coxem (Coxem Technology Research Institute, 5th floor) Schottky Field Emission SEM (FX-2000) DVIA-ULFB700 installation report. After installation, tuning and vibration measurement were performed with the equipment Turned on/IDLE. On the isolated DVIA-ULFB700 platform, all X/Y/Z axes met the required VC-E specification. Per-axis Autospectrum and VC curves plus the installation photo are published.

Changdi New Materials Technology (Shanghai, China) Hitachi High-Tech SU3800SE FE-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails on vertical while passing left-to-right and front-to-back; the DVIA-ML1000 platform passes all axes); vertical/left-to-right/front-to-back autospectrum and equipment photo published.

BIEL Crystal (Huizhou, Guangdong, China) Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails only on vertical while the DVIA-ML1000 platform passes vertical, left-to-right, and front-to-back). Vertical/Left-to-Right/Front-to-Back VC curves and the client tuning request form are published.

BIEL Crystal (Huizhou, Guangdong, China) Thermo Fisher Scientific Helios 5 FIB-SEM DVIA-ML1000 installation report — the active isolation platform meets the vibration specification on all axes (floor fails on vertical while the DVIA-ML1000 platform passes on vertical, left-to-right, and front-to-back); vertical/left-to-right/front-to-back VC curves published.