TESCAN MIRA LMS FE-SEM DVIA-ML1000 Installation Report
Contents
Overview
The objective of this report is to verify that the top vibration of the DVIA-ML1000 meets the vibration specification of the TESCAN MIRA LMS FE-SEM (Section 9) after the 4th tuning trial.
Re-tuning and vibration measurement of the DVIA-ML1000 were performed at WUST.
Vibration measurement was conducted with the customer equipment in the Idle state.
Data is represented in Autospectrum format with the floor as the reference. Reference material on vibration levels is provided in Section 18.
Vibration Isolation System Information
Model: DVIA-ML1000
Serial Number: 260731R3
Engineer
Taehun Kim · DAEIL SYSTEMS
Tuning Date
2026.10.14
End User
Wuhan University of Science and Technology
Number of Tuning Trial
5th
Site
Wuhan
Equipment
Manufacturer: TESCAN
Equipment: FE-SEM
Model: MIRA LMS
Vibration Specification
| Frequency [Hz] | Allowable [µm/s RMS] |
|---|---|
| 1 ~ 30 | 5 |
| 30 ~ 100 | 10 |
Equipment Condition
Idle
Tuning Request
Conclusion
The DVIA-ML1000 (S/N 260731R3) installed under the TESCAN MIRA LMS FE-SEM at WUST (Wuhan) meets the TESCAN vibration specification on all three axes after the first tuning trial.
Measurements were taken with the SEM in the Idle state.
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-ML1000 | |||
| 1. Floor 2. DVIA-ML1000 | See Section 9 | Vertical | ✓ PASS | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical
Vertical — Autospectrum
Left to Right
Left to Right — Autospectrum
Front to Back
Front to Back — Autospectrum
Installation Photo
Equipment
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
