ZEISS Gemini SEM 560 DVIA-ULF1000 Installation Report
Contents
Overview
Following the installation of DVIA-ULF 1000 at Xi’an, tuning and vibration measurement were performed.
Vibration measurement was conducted with the equipment in the Idle state.
Data is represented in Autospectrum format and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-ULF 1000
Serial Number: 250923R4
Engineer
Younguk KIM · DAEIL SYSTEMS
Tuning Date
2026.10.13
End User
Xi’an Jiaotong University Testing Center
Number of Tuning Trial
1st
Site
Xi’an
Equipment
Manufacturer: ZEISS
Equipment: SEM
Model: Gemini SEM 560
Vibration Specification
Horizontal
| Frequency [Hz] | Allowable [µm/s RMS] |
|---|---|
| 1 | 5 |
| 10 | 10 |
| 60 | 14 |
Vertical
| Frequency [Hz] | Allowable [µm/s RMS] |
|---|---|
| 1 | 4 |
| 10 | 14 |
| 60 | 20 |
Equipment Condition
Idle
Tuning Request
Conclusion
A resonance was observed at around 2–3 Hz on the horizontal axes, and isolation performance in the 4–5 Hz range came in lower than expected. While the target attenuation of -20 dB was not fully reached, we don’t expect this to affect equipment operation. We walked the customer through these results, and the installation was wrapped up on that basis.
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-ULF 1000 | |||
| 1. Floor 2. DVIA-ULF 1000 | See Section 9 | Vertical | ✓ PASS | ✓ PASS |
| Left to Right | ✓ PASS | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
Measurement Data Obtained via UI Program
Vertical
Vertical — Autospectrum
Left to Right
Left to Right — Autospectrum
Front to Back
Front to Back — Autospectrum
Installation Photo
Equipment
Reference
The table below classifies vibration levels based on IEST-RP-CC012.2.
Notes:
1. As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).
2. The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.
The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.
