Installation Report

10-13-2026

AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

DVIA-M Series

Installation Report

National Center for Nanoscience and Technology

Aipin Instrument Technology

AIPIN STM

DVIA-ML1000

221024R3

Overview

Re-tuning of the DVIA-M1000 (S/N 221024R3) at the National Center for Nanoscience and Technology in Beijing was performed in response to isolator instability reported by the customer, followed by vibration measurement. Vibration was measured on the floor and on the isolator with the AIPIN STM in the IDLE state. Results are presented as Autospectrum and VC Curves for each axis, together with a reference table of vibration criteria.

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 221024R3

Engineer

Taehun Kim · DAEIL SYSTEMS

Tuning Date

2026.10.13

End User

National Center for Nanoscience and Technology

Number of Tuning Trial

5th (re-tuning)

Site

Beijing

Equipment

Manufacturer: Aipin Instrument Technology

Equipment: STM

Model: AIPIN STM

Vibration Specification

No vibration specification for the mounted equipment was available from the manufacturer or the end user at the time of measurement. This report therefore presents measured vibration levels only and makes no PASS/FAIL determination.

Equipment Condition

The mounted UHV STM system is mechanically connected to off-isolator structures (floor-standing frame, transfer rods, hoses and cables); the isolator was therefore not in a fully isolated condition during measurement.

Tuning Request

Image 1 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Conclusion

Floor vibration was attenuated on all axes except the 12–16 Hz band on the horizontal axes, where the isolator level exceeded the floor. The isolator reached VC-G (Vertical) and VC-E (Left to Right, Front to Back).

This horizontal amplification is attributed to mechanical connections between the mounted system and surrounding structures, which bypass the isolator (Section 10).

As no vibration specification was provided (Section 9), final assessment rests with the equipment manufacturer or the end user.

Measurement Summary

Measurement Point		Axis
1. Floor<br>2. DVIA-ML1000	Vertical	VC-C	VC-G
	Left to Right	VC-D	VC-E
	Front to Back	VC-D	VC-E

Measurement Data Obtained via UI Program

Vertical

Vertical — Autospectrum

Image 2 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Vertical — VC Curves

Image 3 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Left to Right

Left to Right — Autospectrum

Image 4 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Left to Right — VC Curves

Image 5 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Front to Back

Front to Back — Autospectrum

Image 6 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Front to Back — VC Curves

Image 7 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Installation Photo

Equipment

Image 8 — AIPIN STM DVIA-ML1000 Re-Tuning Installation Report

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion Curve	Description	Amplitude¹μm/s (μin/s)	Detail Size²μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.	100 (4,000)	25
VC-A	Adequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment (including steppers) to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.	12.5 (500)	1-3
VC-D	Suitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.	6.25 (250)	0.1-0.3
VC-E	A challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.	3.12 (125)	<0.1
VC-F	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	1.56 (62.5)	N/A
VC-G	Appropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.	0.78 (31.3)	N/A

¹ As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

² The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.