LG Innotek NanoSystem White-Light Interferometer DVIA-ULF1000 Installation Report

Following the installation of DVIA-ULF1000 in the 2F cleanroom of Gumi Plant 4 (LG Innotek), tuning and performance verification were performed.

Inspection and vibration measurement were conducted in the IDLE state.

Data is represented in VC Curve format and reference material on the vibration level is provided.

Model: DVIA-ULF1000

Serial Number: 260821S1

Gyumin Park · DAEIL SYSTEMS

26.09.29

2F cleanroom, Gumi Plant 4

LG Innotek

Manufacturer: NanoSystem

Equipment: Precision measurement equipment (white-light interferometer)

Model: -

-

IDLE

Hardware: DVIA-ULF1000

Software: Monitor_TU_6DOF

1) Installation and Vibration Isolation Performance (IDLE State)

Installation Summary: The installation and tuning of DVIA-ULF1000 for the NanoSystem precision measurement equipment (white-light interferometer) in the 2F cleanroom of Gumi Plant 4 (LG Innotek) was completed.

IDLE (static) performance: The measurement results confirmed vibration levels of VC-F on the Vertical (Z-axis), VC-E on the Left to Right (X-axis), and VC-D on the Front to Back (Y-axis), verifying excellent vibration isolation performance.

2) On-site Measures and Dynamic Performance Test Progress

Day 1 (9/28):

After the initial installation and tuning, attempts were made to verify performance in the static state and stability against eccentricity changes during stage operation.

Because the shortest length of the level feet under the top equipment was similar to the ULF unit height, an interference (collision) issue occurred between the level feet and the floor during stage operation, and the work was carried over to next-day rework for height correction.

Day 2 (9/29):

After placing a rubber isolation pad under the vibration isolation unit to secure height, the reinstallation and retuning were completed.

Actual measurement performance verification: After loading a dummy wafer and running the recipe (X/Y-axis stage movement), a performance test under the stage-stopped condition showed that vibration was significantly improved compared to before, confirming that normal equipment operation is possible.

3) Follow-up Plan and Recommendations

Unit position fixation: To prevent unit position displacement during continuous stage operation and to prevent the installed equipment from falling, anchoring to the floor with anchor bolts is recommended.

Vertical (Z-axis)