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Installation Report
DVIA-ML Series
08-25-2026

CEPREI Thermo Fisher Scientific (S)TEM Talos F200X DVIA-ML3000 (260424R5) Installation Report

DVIA-ML Series
Installation Report
CEPREI
Thermo Fisher Scientific
Talos F200X
TEM
DVIA-ML3000
260424R5
Guangzhou
China

Contents

Overview

Following the installation of DVIA-ML3000 at Guangzhou (广州), tuning and vibration measurement were performed.

Vibration measurement was conducted with the equipment in the IDLE state.

Data is represented in Autospectrum formats and reference material on the vibration level is provided.

Vibration Isolation System Information

Model: DVIA-ML3000

Serial Number: 260424R5

Engineer

Younguk KIM · DAEIL SYSTEMS

Tuning Date

2026.08.25

End User

CEPREI (电子五所)

Number of Tuning Trial

1st

Site

Guangzhou (广州)

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: (S)TEM

Model: Talos F200X

Vibration Specification

Horizontal

Frequency [Hz]Allowable [VC-Curve]
11.5625 [VC-F]
1001.5625 [VC-F]

Vertical

Frequency [Hz]Allowable [VC-Curve]
13.125 [VC-E]
1003.125 [VC-E]

Equipment Condition

IDLE

Tuning Request

Measurement Summary

Measurement PointVibrationSpecificationsAxisResult
FloorDVIA-ML3000
1. Floor
2. DVIA-M-THT3		See Section 9Vertical✗ FAIL✓ PASS
Left to Right✗ FAIL✓ PASS
Front to Back✓ PASS✓ PASS

Measurement Data Obtained via UI Program

Vertical — Autospectrum

Left to Right — Autospectrum

Front to Back — Autospectrum

Installation Photo

Equipment

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion CurveDescriptionAmplitude
µm/s (µin/s)		Detail Size
µm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.100 (4,000)25
VC-AAdequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment (including steppers) to 3μm line widths.25 (1,000)3
VC-CAppropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.12.5 (500)1-3
VC-DSuitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.6.25 (250)0.1-0.3
VC-EA challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.3.12 (125)<0.1
VC-FAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.1.56 (62.5)N/A
VC-GAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.0.78 (31.3)N/A

Notes:

- As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

- The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is not relevant to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.

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Case Study Information

Category
Installation Report
SeriesDVIA-ML Series
Date08-25-2026
Tags
DVIA-ML Series
Installation Report
CEPREI
Thermo Fisher Scientific
Talos F200X
TEM
DVIA-ML3000
260424R5
Guangzhou
China

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