Installation Report

DVIA-ML Series

04-22-2026

Guangzhou GRG Thermo Fisher Talos TEM DVIA-ML3000 (260128R4) Installation Report

DVIA-ML Series

Installation Report

Thermo Fisher Scientific

Talos

TEM

DVIA-ML3000

GUANGZHOU GRG

China

Overview

The DVIA-ML3000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-ML3000

Serial Number: 260128R4

Engineer

Chaewon Lee DAEIL SYSTEMS

Tuning Date

April 22, 2026

Report written date

April 23, 2026

End User

GUANGZHOU GRG METROLOGY & TEST CO., LTD.

Number of Tuning Trial

1st

Location

Zhejiang, China

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: TEM

Model: Talos

Vibration Specification

Equipment Condition

The equipment is turned on/IDLE

Tuning Request

Measurement Summary

Measurement Point	Status	Axis	Vibration Specification	Floor	DVIA-ML3000	Floor	DVIA-ML3000
1.Floor 2.DVIA-ML3000	Equipment is turned on/IDLE	Vertical	Refer to item 9	VC-C @ 4 Hz	VC-G @ 4 Hz	✗ FAIL	✓ PASS
		Left to Right	Refer to item 9	VC-E @ 3.15 Hz	VC-E @ 3.15 Hz	✗ FAIL	✓ PASS
		Front to Back	Refer to item 9	VC-D @ 4 Hz	VC-G @ 4 Hz	✗ FAIL	✓ PASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Equipment picture

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

- The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.