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Installation Report
DVIA-ML Series
07-23-2026

Ansteel Iron and Steel Research Institute Thermo Scientific Talos TEM DVIA-ML3000 (251125R4) Installation Report

DVIA-ML Series
Installation Report
YIMO TECH
Ansteel Iron and Steel Research Institute
Thermo Scientific
Talos
TEM
DVIA-ML3000
251125R4
Anshan
China

Overview

Following the installation of DVIA-ML3000 at Anshan, tuning and vibration measurement were performed.

Vibration measurement was conducted with the equipment in the IDLE state.

Data is represented in VC Curve format and reference material on the vibration level is provided.

Vibration Isolation System Information

Model: DVIA-ML3000

Serial Number: 251125R4

Engineer

Gyumin.Park · DAEIL SYSTEMS

Tuning Date

26.07.23

Report Written Date

26.07.27

Customer

YIMO TECH

End User

Ansteel Iron and Steel Research Institute

Number of Tuning Trial

1st

Site

Anshan

Equipment

Manufacturer: Thermo Scientific

Equipment: TEM

Model: Talos

Vibration Specification

Horizontal

Frequency [Hz]Allowable [µm/s RMS]
11.56
1001.56

Vertical

Frequency [Hz]Allowable [µm/s RMS]
13.12
1003.12

Equipment Condition

IDLE

Tuning Request

Measurement Summary

Measurement PointVibrationSpecificationsAxisResult
FloorDVIA-ML3000
1.Floor
2.DVIA-ML3000
See Section 9VerticalFAILPASS
Left to RightFAILPASS
Front to BackFAILPASS

Measurement Data Obtained via UI Program

Vertical VC Curves

Left to Right VC Curves

Front to Back VC Curves

Installation Photo

Reference

The table below classifies vibration levels based on IEST-RP-CC012.2.

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances. Usually adequate for computer equipment, hospital recovery rooms, semiconductor probe test equipment, and microscopes less than 40x.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable in most instances for surgical suites, microscopes to 100x and for other equipment of low sensitivity.100 (4,000)25
VC-AAdequate in most instances for optical microscopes to 400x, microbalances, optical balances, proximity and projection aligners, etc.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment (including steppers) to 3μm line widths.25 (1,000)3
VC-CAppropriate standard for optical microscopes to 1000x, lithography and inspection equipment (including moderately sensitive electron microscopes) to 1μm detail size. TFT-LCD stepper/scanner processes.12.5 (500)1-3
VC-DSuitable in most instances for demanding equipment, including many electron microscopes (SEMs and TEMs) and E-Beam systems.6.25 (250)0.1-0.3
VC-EA challenging criterion to achieve. Assumed to be adequate for the most demanding of sensitive systems including long path, laser-based, small target systems, E-Beam lithography systems working at nanometer scales, and other systems requiring extraordinary dynamic stability.3.12 (125)<0.1
VC-FAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.1.56 (62.5)N/A
VC-GAppropriate for extremely quiet research spaces; generally difficult to achieve in most instances, especially cleanrooms. Not recommended for use as a design criterion, only for evaluation.0.78 (31.3)N/A

Notes:

- As measured in one-third octave bands of frequency over the frequency 8 to 80 Hz (VC-A and VC-B) or 1 to 80 Hz (VC-C through VC-G).

- The detail size refers to the width in the case of microelectronics fabrication, the particle (cell) size in the case of medical and pharmaceutical research, etc. It is to imaging associated with probe technologies, AFMs, and nanotechnology.

The information given in this table is for guidance only. In most instances, it is recommended that the advice of someone knowledgeable about applications and vibration requirements of the equipment and processes be sought.

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Case Study Information

Category
Installation Report
SeriesDVIA-ML Series
Date07-23-2026
Tags
DVIA-ML Series
Installation Report
YIMO TECH
Ansteel Iron and Steel Research Institute
Thermo Scientific
Talos
TEM
DVIA-ML3000
251125R4
Anshan
China