Vibration Isolation Case Studies

DVIA-P4000 installation report (serial 240424R1) at Huahong FAB 9 for ASML E-beam wafer inspection system eScan460. Second tuning trial; tuning 2026-05-28, report written 2026-06-01. Data Physics QUATTRO DAQ; vibration specification VC-D. Equipment installed on the platform in IDLE state. Publishes vertical, left-to-right, and front-to-back VC curves. Word cover graphic omitted; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-P7000 installation report (serial 250131R4) at Huahong FAB 9 for Dongfang Jingyuan Electron Limited E-beam wafer inspection system (SEpA_i515). Source: DVIA-P7000_250131R4 installation report_26.05.27.docx; 2nd tuning trial, tuning 2026-05-27, report written 2026-06-01. Published VC curves for vertical, left-to-right, and front-to-back axes. Word letterhead graphic (image1) omitted from public copy; Reference uses the site VC criteria table (image5.emf not published).

DVIA-P4000 installation report (serial 250902R8) for the Dongfang Jingyuan Microelectronics DJEL CD SEM SepA-C310s installed at INNOPARK by HKSTP, Microelectronics Centre, 1 Fuk Wang Street, Hong Kong. Tuning and vibration measurement were carried out on June 3, 2026 (1st tuning trial) by DAEIL SYSTEMS engineer Juhyeok Kim, and the report was written on June 15, 2026. The vibration specification is VC-C from 1-100 Hz and VC-D from 100-200 Hz; both the floor and the DVIA-P4000 passed on all three axes. Twelve plots are published — autospectrum, VC curves and transmissibility for two vertical (Z-axis) measurement sets and for the left-to-right (X-axis) and front-to-back (Y-axis) axes. The DAEIL SYSTEMS cover wordmark is omitted from the public copy.

DVIA-P4000 installation report (serial 251215R5) at Hua Hong FAB 9 for ASML E-beam wafer inspection system eScan460. Engineer Chaewon Lee; tuning May 28, 2026; report written June 11, 2026. Vibration specification VC-D. Published vertical, left-to-right, and front-to-back VC curves only. Word cover graphic (image1) omitted; Equipment Picture unavailable in source; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-ML1000 installation report (serial 250718R2) for a Hitachi High-Tech FE-SEM (SU8600) at Ningbo University of Technology, Ningbo in China. Tuning was carried out on 2026.06.05, and vibration measurements were taken from the floor and on the DVIA-ML1000 across vertical, left-to-right and front-to-back axes.

DVIA-UB700 (S/N 180927R1) vibration worksheet at Shanghai Institute of Technical Physics (SITP), 1st floor site. Setup 18.12.19; measurement 2018.12.19; report written 18.12.26 per worksheet. Posts VC-Class floor vs Above Active summary and MB1000 internal-program plus octave-band (Floor vs Above Active) Z/X/Y plots; decorative title-block images (media/image1, image2) omitted.