Huahong ASML eScan460 DVIA-P4000 Installation Report
Contents
Overview
Following the installation of DVIA-P4000 at Hua hong FAB 9, tuning and vibration measurement were performed.
Vibration measurement was conducted with the Equipment installed and in the turned-on state.
Data is represented in VC Curve format, and reference material on the vibration level is provided.
Vibration Isolation System Information
Model: DVIA-P4000
Serial Number: 251215R5
Engineer
Chaewon Lee · DAEIL SYSTEMS
Tuning Date
May 28, 2026
End User
Hua Hong Semiconductor
Number of Tuning Trial
1st
Location
Hua Hong FAB 9
Equipment
Manufacturer: ASML
Equipment: E-beam Wafer inspection system
Model: eScan460
Vibration Specification
VC-D
Equipment Condition
Vibration measurement was performed with the customer's equipment installed but not operating.
Measurement Summary
| Measurement Point | Vibration Specifications | Axis | Result | |
|---|---|---|---|---|
| Floor | DVIA-P4000 | |||
| 1. Floor 2. DVIA-P4000 | VC-D | Vertical | ✗ FAIL | ✓ PASS |
| Left to Right | ✗ FAIL | ✓ PASS | ||
| Front to Back | ✓ PASS | ✓ PASS | ||
Data and Image
Vertical VC Curves
Left to Right VC Curves
Front to Back VC Curves
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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