Installation Report

DVIA-P Series

06-15-2026

HKSTP INNOPARK Dongfang Jingyuan DJEL CD SEM SepA-C310s DVIA-P4000 Installation Report

DVIA-P Series

Installation Report

HKSTP

Dongfang Jingyuan Microelectronics

DJEL CD SEM

SepA-C310s

DVIA-P4000

250902R8

Overview

After the DVIA-P4000 was installed at INNOPARK by HKSTP, tuning and vibration measurement were performed at the Microelectronics Centre, 1 Fuk Wang Street.

The data is presented as VC Curves, and reference material on vibration levels is provided.

Vibration Isolation System

Model: DVIA-P4000

Serial Number: 250902R8

Engineer

Juhyeok Kim · DAEIL SYSTEMS

Tuning Date

June 3, 2026

End User

HKSTP

Number of Tuning Trials

1st

Location

INNOPARK by HKSTP, Microelectronics Centre, 1 Fuk Wang Street

Customer Equipment

Manufacturer: Dongfang Jingyuan Microelectronics

Equipment: DJEL CD SEM

Model: SepA-C310s

Vibration Specification

Frequency [Hz]	VC Curve
1-100	VC-C
100-200	VC-D

Measurement Summary

Measurement Point	Vibration Specification	Axis	Floor	DVIA-P4000
1. Floor 2. DVIA-P4000	See Section 9	Vertical (Z-axis)	✓ PASS	✓ PASS
		Left to Right (X-axis)	✓ PASS	✓ PASS
		Front to Back (Y-axis)	✓ PASS	✓ PASS

Measurement Data

Vertical Autospectrum (1)

Vertical VC Curves (1)

Vertical Transmissibility (1)

Vertical Autospectrum (2)

Vertical VC Curves (2)

Vertical Transmissibility (2)

Left to Right Autospectrum

Left to Right VC Curves

Left to Right Transmissibility

Front to Back Autospectrum

Front to Back VC Curves

Front to Back Transmissibility

Reference

The table below classifies vibration levels according to IEST-RP-CC012.2.

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths, including steppers.	25 (1,000)	3
VC-C	Standard criterion for demanding equipment, optical microscopes to 1000x.	12.5 (500)	1 - 3
VC-D	Suitable for high-performance SEM, TEM and E-Beam systems.	6.25 (250)	0.1 - 0.3
VC-E	For laser-based systems and nanometer-scale precision equipment.	3.12 (125)	< 0.1
VC-F	For ultra-precision research facilities. Difficult to achieve in a cleanroom.	1.56 (62.5)	N/A
VC-G	For ultra-precision research facilities. Difficult to achieve in a cleanroom.	0.78 (31.25)	N/A