Vibration Isolation Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
Series
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All Case Studies
Tier-1 Semiconductor MB3000 P2 Cheongju vibration environment measurement — 2015.10.16
Post-installation vibration survey for MB3000 at Tier-1 Semiconductor (Cheongju Fab 1, P&T2 analysis laboratory, 4th floor): VC-CLASS summary for floor vs platform top and vertical (Z) and horizontal (X, Y) VC curves. Engineer Jong-wook Lim (DAEIL SYSTEMS), measurement date 16 October 2015.
KRICT Building 10 L3 EMI room DVIA-MB3000 vibration environment measurement (September 2015)
Post-install vibration survey at Korea Research Institute of Chemical Technology comparing floor vs DVIA-MB3000 top plate in VC-Class for Z/X/Y axes, including annotated BASE/TOP locations and 1/3-octave velocity curves.
Korea Research Institute of Chemical Technology MB3000 vibration survey — Research Building 10 (2015.09.10)
Post-installation vibration survey at KRICT (Research Building 10, 3rd floor electron microscopy lab) on 10 September 2015 with an MB3000 isolator: measurement-position diagram, VC-class summary table for floor vs isolator top (Z/X/Y), and narrative interpretation. Per-axis VC-class graphs are titled in the source document but were not supplied as separate embedded figures.
China business trip report — MB1000 P11 setup and vibration environment evaluation (September 2015)
Trip worksheet dated 2015.09.03 (travel 15.08.31–15.09.02) for MB1000_P11: site photograph after the title block, ACTIVE VC-Class summary table, MB1000 internal-program captures for Z/X/Y, and vibration-environment plots for Z/X/Y. Narrative covers 50 Hz mains-related peaks on internal-program plots and NEMO’s assessment.
DVIA-M type (MB1000) Installation test — NEMO — 2015-09-03
NEMO DVIA-M type (MB1000) Installation Test Report (installation and measurement on 2015-09-01, reporting on 2015-09-03 by LIM JONG UK, Daeil Systems). Installation Results Summary table and bullets follow the DOCX extract; figures follow paragraph-order §2a mapping — internal-program transmissibility Z/X/Y (rId6–8 → images 1–3), first PULSE 1/3-octave band Z/X/Y (rId9–11 → images 4–6), second PULSE 1/3-octave band Z/X/Y (rId12–14 → images 7–9).
MB1000 P11 DVIA-MB1000 factory vibration environment survey — China pre-shipment (2015-07-28)
2015 factory worksheet for MB1000 program P11 recorded at the DAEIL SYSTEMS plant before China shipment: 450 kg dummy load, measurements on the isolation platform top and floor (base) behind the unit. Published VC-Class curves (base vs platform top), octave-band active plots for Z / X / Y, and VAAV results for three axes, plus the handwritten summary table and notes from the handout.