Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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Korea University M1000 P7 vibration survey — 2014-07-25
Vibration environment worksheet for Korea University (College of Engineering industry–university building, 2F) after M-1000 P7 isolator work with an FEI SEM: measurement conditions, VC-Class and transmissibility summary table, discussion notes (including FEI comments, follow-up measurement plans, tuning observations, passive-state peak notes), VAAV captures (Passive Z/X/Y and FFF Z/X/Y), plus transmissibility and octave-band charts rasterized from Word-exported PDF pages (embedded OOXML charts). Decorative title-block raster at the document start (Word image1) is not published.

FEI SEM LSM M-1000 P4 vibration environment measurement — 2014-07-08
2014 measurement with an FEI SEM on an M-1000 P4 isolation platform at the LSM fourth-floor site: ACTIVE VC-Class summary on floor (base) versus platform top, narrative observations from the handout, one site photograph, transmissibility plots for Z/X/Y, and 1/3 octave velocity plots for Active Z/X/Y. Decorative header artwork from the DOCX is omitted from the public page.

LS Mtron — M-1000 P4 vibration measurement with FEI SEM (2014-07-08)
Vibration environment worksheet dated 2014-07-08 for the M-1000 P4 platform with FEI SEM at LS Mtron (4th floor): measurement-location diagram, VC-class summary with transmissibility at 10 Hz, narrative interpretation bullets, six VAAV program captures (Passive and FFF states, Z/X/Y), transmissibility plots (Z and X together; Y on a dedicated view), and 1/3 octave-band Active Z/X/Y curves reproduced in the same layout as the handout charts.

Bruker BioScience demo room — M-1000 P2 vibration environment measurement — 2014-06-18
2014-06-18 vibration environment worksheet at Kins Tower 15F Bruker BioScience demo room (engineer Choi Seong-won, DAEIL SYSTEMS): overview and measurement conditions while Carl Zeiss-mounted equipment was running, VC-Class summary on base versus isolator top under ACTIVE control, four narrative bullets from the handout, two site photographs of sensor placement, six VAAV captures (Passive Z/X/Y and FFF Z/X/Y), passive versus active transmissibility plots exported from embedded Word charts (Z+X combined page, Y-axis page), and 1/3 octave-band active plots (Z+X combined page, Y-axis page). Decorative header bitmap before the title in the DOCX is not republished. Generic vibration criteria are given as the standard markdown table only.

Bruker BioScience DVIA-M1000 P2 setup survey — Carl Zeiss SUPRA 55 VP demo room (2014-06-18)
Compact vibration-environment handout dated 18 June 2014 for the Bruker BioScience demonstration laboratory at Kin’s Tower, with the Carl Zeiss SUPRA 55 VP SEM on and active isolation engaged. Included public materials are probe-location diagrams referenced in §4 plus VAAV FFF captures along Z, X, and Y, together with summary tables keyed to allowable SUPRA 55 VP RMS limits.

Bruker BioScience DVIA-M1000 P2 vibration survey — Carl Zeiss SUPRA 55 VP demo room (2014-06-18)
Vibration-environment survey dated 18 June 2014 at the Bruker BioScience Kin’s Tower demo room after an M-1000 P2 active isolation platform installation, while a Carl Zeiss SUPRA 55 VP SEM was operated. Published materials are the probe-location diagrams referenced in §4, VAAV FFF captures for three axes, and 1/3 octave renditions of the embedded Active-response charts rebuilt from chart data in the DOCX archive — plus summary tables reproduced from the handout.