Tier-1 Semiconductor DVIA-MB3000 P5 vibration survey — Hwaseong NRD Building (2016.03.30)
Contents
Overview
After installing the vibration isolation platform, the vibration environment was measured to verify there would be no issues for equipment operation.
Measurement date
30 March 2016 (Wednesday)
Operator
Lim Jong-wook, DAEIL SYSTEMS
Measurement site
Tier-1 Semiconductor Hwaseong campus, NRD building, 6th floor
Measurement conditions and results
Measurement conditions: Vibration levels were measured on the DVIA-MB3000 upper platform and on the research-building floor and expressed as VC classes.
Measurement result summary
| Test condition | Z | X | Y |
|---|---|---|---|
| Floor | A | B | A |
| Platform top | D | E | F |
For the vertical axis, the condition is favorable at D class at 50 Hz and at E class across the remaining frequency bands.
For the horizontal axes, the condition is favorable at E class on X and at F class on Y.
Equipment allowable vibration criteria are approximately close to D class as shown in the diagrams below; vibration levels on the isolator upper surface are favorable at or below D class in all directions, satisfying the equipment criteria.
Equipment allowable vibration criteria
Vertical vibration criterion diagram
Horizontal vibration criterion diagram
VC-CLASS vibration environment graphs
Vertical axis (Z) vibration level
Horizontal axis (X) vibration level
Horizontal axis (Y) vibration level
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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