Tier-1 Semiconductor ZEISS Versa 620 X-ray Microscope DVIA-MB3000 (170515R4) Installation Report — 2025.07.08
Contents
Overview
At Tier-1 Semiconductor Cheonan campus C5, 1st floor analysis laboratory, tuning and vibration measurements were performed on the installed DVIA-MB3000.
Measurements were carried out with the equipment Turned on/IDLE.
Data are presented on VC curves and reference material on vibration levels is provided.
Vibration Isolation System Information
Model: DVIA-MB3000
Serial Number: 170515R4
Engineer
Seo Jong-hwa, DAEIL SYSTEMS field engineer
Measurement date
8 July 2025
Report written date
2025.07.10
End User
Tier-1 Semiconductor
Installation site
Tier-1 Semiconductor Cheonan campus C5, 1st floor analysis laboratory
Equipment Condition
장비 Turned on/IDLE
Customer equipment
Manufacturer: ZEISS
Equipment: X-ray Microscope
Model: Versa 620
Vibration measurement instruments
9.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement setup
F Span: 200 Hz
Lines: 3200
Engineering Units: m/s
Window: Hanning
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40
Equipment vibration specification
Conclusion
All directions satisfy the specification.
Measurement data
| Measurement site | State | Vibration spec | Direction | Measured (Floor) | Measured (DVIA-MB3000) | Result (Floor) | Result (DVIA-MB3000) |
|---|---|---|---|---|---|---|---|
| Tier-1 Semiconductor Cheonan campus C5, 1st floor analysis laboratory — measurement positions: (1) Floor (2) DVIA-MB3000 | 장비 Turned on/IDLE | VC-C | Vertical | VC-B@ 10 Hz | VC-F@ 10 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-E@ 16 Hz | VC-G@ 16 Hz | ✓ PASS | ✓ PASS | |||
| Front to Back | VC-D@ 16 Hz | VC-G@ 16 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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