Tier-1 Semiconductor ZEISS Versa 630 3D X-ray Microscope DVIA-MB3000 (241011R1) Installation Report — 2024.11.27
Contents
Overview
Tuning and vibration measurement were performed for the DVIA-MB3000 installed at Samsung Display Giheung campus.
The DVIA-MB3000 was connected to a laptop; feedback and feed-forward tuning through the UI software, and performance verification by vibration measurement using Data Physics DAQ instrumentation, were performed.
Because data export from the site was restricted, this report was prepared without measurement data and images (per customer site agreement).
Vibration Isolation System Information
Model: DVIA-MB3000
Serial Number: 241011R1
Engineer
DAEIL SYSTEMS field engineer Chae-won Lee
Measurement date
27 November 2024
Report written date
2024.11.29
Measurement site
Samsung Display Giheung SDR 1F Research 05 analytical laboratory
Equipment Condition
Equipment installed and IDLE
Customer equipment
Manufacturer: ZEISS
Equipment: 3D X-ray Microscope
Model: Versa 630
Vibration measurement instruments
8.1) Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
8.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement setup
Bandwidth: 200 Hz
Lines: 3200
Averaging: FFT Spectrum Averaging
Averaging mode: Exponential, 40 Frames
Engineering Units: m/s
Window: Hanning
Equipment vibration specification
Conclusion
Vertical: On the floor, vibration at VC-E is measured at 25 Hz. On the DVIA-MB3000, VC-G vibration is measured across all frequency bands.
Left to Right: On the floor, vibration at VC-E is measured at 63 Hz. On the DVIA-MB3000, VC-G vibration is measured across all frequency bands.
Front to Back: On the floor, vibration at VC-E is measured at 31.5 Hz. On the DVIA-MB3000, VC-G vibration is measured across all frequency bands.
The equipment vibration specification is met in every direction.
Measurement data
| Measurement site | State | Direction | Floor | DVIA-MB3000 |
|---|---|---|---|---|
| Samsung Display SDR 1F Research 05 analytical laboratory — 1. Floor 2. DVIA-MB3000 | Equipment installed and IDLE | Vertical | VC-E @ 25 Hz | VC-G @ 25 Hz |
| Left to right | VC-E @ 63 Hz | VC-G @ 40 Hz | ||
| Front to back | VC-E @ 31.5 Hz | VC-G @ 10 Hz |
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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