Tier-1 Semiconductor ZEISS Xradia Context microCT DVIA-MB3000 (240304R3) Installation Report — 2024.04.02
Contents
Overview
Installation tuning and vibration measurement for the DVIA-MB3000 were performed at the customer site.
Vibration measurements were conducted with the equipment idle.
The DVIA-MB3000 was connected to a notebook computer for tuning via the UI program; checks used vibration measurement with Data Physics equipment.
Measurements compared air conditioner on versus off.
Vibration isolation platform
Model: DVIA-MB3000
Serial Number: 240304R3
Engineer
Chaewon Lee from DAEIL SYSTEMS
Installation date
April 2, 2024
Installation site
Highbrand Building 7F, Yongin, Gyeonggi-do, Korea
Customer equipment
ZEISS Xradia Context microCT
Equipment vibration specification
VC-C
Equipment status
Equipment is installed/ Idle
Number of tuning trials
1
Vibration measurement equipment
9.1) Data Physics
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
9.2) Accelerometer
PCB Accelerometer
Model: 393B05
Vibration measurement setup
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s
Conclusion
At both air conditioner on and off, elevated vibration on the DVIA-MB3000 is observed at 50 Hz. This is attributed to vibration with the equipment idle.
With the air conditioner on, a resonance peak appears at 80 Hz. This is attributed to air flow from the air conditioner.
With the air conditioner running, the specification is met, but overall vibration increases. Installing an air-flow baffle on the air conditioner is recommended for better performance.
Measurement data
| Measurement point | State | Direction | Specification | Measurement (floor) | Measurement (DVIA-MB3000) | Result (floor) | Result (DVIA-MB3000) |
|---|---|---|---|---|---|---|---|
| Tier-1 Semiconductor | Air conditioner On | Vertical | 1.25E-05 | 1.40E-05 @ 8 Hz | 6.77E-07 @ 8 Hz | ✗ FAIL | ✓ PASS |
| 1.25E-05 | 2.33E-05 @ 63 Hz | 2.63E-06 @ 63 Hz | ✗ FAIL | ✓ PASS | |||
| Tier-1 Semiconductor | Air conditioner On | Left - Right | 1.25E-05 | 1.12E-05 @ 2 Hz | 1.78E-06 @ 2 Hz | ✓ PASS | ✓ PASS |
| 1.25E-05 | 7.78E-07 @ 50 Hz | 1.63E -05 @ 50 Hz | ✓ PASS | ✓ PASS | |||
| Tier-1 Semiconductor | Air conditioner On | Front - Back | 1.25E-05 | 1.25E-05 @ 2 Hz | 2.24E -06 @ 2 Hz | ✗ FAIL | ✓ PASS |
| Tier-1 Semiconductor | Air conditioner Off | Vertical | 1.25E-05 | 1.39E-05 @ 4 Hz | 2.66E-06 @ 4 Hz | ✗ FAIL | ✓ PASS |
| 1.25E-05 | 1.36E-05 @ 8Hz | 1.77E-06 @ 8 Hz | ✗ FAIL | ✓ PASS | |||
| 1.25E-05 | 2.39E-05 @ 63 Hz | 4.07E-07 @ 63 Hz | ✗ FAIL | ✓ PASS | |||
| Tier-1 Semiconductor | Air conditioner Off | Left - Right | 1.25E-05 | 7.14E-06 @ 2 Hz | 1.36E-06 @ 2 Hz | ✓ PASS | ✓ PASS |
| 1.25E-05 | 7.34E-07 @ 50 Hz | 2.06E-06 @ 50 Hz | ✓ PASS | ✓ PASS | |||
| 1.25E-05 | 3.70E-07 @ 80 Hz | 7.93E-07 @ 80 Hz | ✓ PASS | ✓ PASS | |||
| Tier-1 Semiconductor | Air conditioner Off | Front - Back | 1.25E-05 | 1.56E-05 @ 2 Hz | 1.75E-06 @ 2 Hz | ✗ FAIL | ✓ PASS |
| 1.25E-05 | 6.08E-07 @ 80 Hz | 1.52E-06 @ 80 Hz | ✓ PASS | ✓ PASS |
Data and Image
14.1) Air Conditioner Off
Vertical VC Curves (air conditioner off)
Vertical Transmissibility (air conditioner off, report spelling)
Left to Right VC Curves (air conditioner off)
Left to Right Transmissibility (air conditioner off)
Front to Back VC Curves (air conditioner off)
Front to Back Transmissibility (air conditioner off)
Air conditioner On
Vertical VC Curves (air conditioner on)
Vertical Transmissibility (air conditioner on)
Left to Right VC Curves (air conditioner on)
Left to Right Transmissibility (air conditioner on)
Front to Back VC Curves (air conditioner on)
Front to Back Transmissibility (air conditioner on)
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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