Tier-1 Semiconductor ZEISS TEM 630 VERSA DVIA-MB3000 (171201R2) Installation Report — 2024.11.11
Contents
Overview
At Tier-1 Semiconductor, with the upper isolator equipment Turned off, passive setting, active tuning, and vibration measurements were performed on the platform. Measured vibration is plotted on VC curves and reference material on vibration levels is provided.
Engineer
Jung Sung-yoon, DAEIL SYSTEMS
Measurement date
11 November 2024
Report written date
2024.11.18
Measurement site
Tier-1 Semiconductor R&D building, 1st floor
Customer equipment
Manufacturer: ZEISS
Equipment: TEM
Model: 630 VERSA
Vibration measurement instruments
5.1) Data Physics
Hardware: QUATTRO DP240
Software: SignalCalc ACE
5.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measurement setup
F Span: 200
Lines: 3200
Window: Hanning
Averaging: FFT Spectrum Averaging
Engineering Units: m/s2
Equipment vibration specification
Conclusion
The maximum VC-C vibration is measured on the floor. With the isolator Active On, vibration below VC-G is measured in all three directions.
Measurement result summary
| Measurement position | Direction | Vibration Spec. | Measured | Result |
|---|---|---|---|---|
| Floor | Vertical | VC-C | VC-C | ✓ PASS |
| Floor | Front to back | VC-C | VC-E | ✓ PASS |
| Floor | Left to right | VC-C | VC-E | ✓ PASS |
| Platform top (DVIA-MB3000 Active On) | Vertical | VC-C | VC-G | ✓ PASS |
| Platform top (DVIA-MB3000 Active On) | Front to back | VC-C | VC-G | ✓ PASS |
| Platform top (DVIA-MB3000 Active On) | Left to right | VC-C | VC-G | ✓ PASS |
Data and Image
Passive control off (Passive) — Vertical
Passive control off (Passive) — Front to back
Passive control off (Passive) — Left to right — VC curves
Passive control off (Passive) — Left to right — Autospectrum
Passive control off (Passive) — Left to right — Transmissibility
Active control on — Vertical — VC curves
Active control on — Vertical — Autospectrum
Active control on — Vertical — Transmissibility
Active control on — Front to back
Active control on — Left to right
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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