HITACHI SEM SU8010 DVIA-MB1000 program P14 — Giheung vibration survey (2015-12)

After installation of the isolation platform, the vibration environment was measured to confirm suitability for SEM operation.

Survey date : 2015. 12. 07 (Mon), Engineer : Jong-wook Lim (DAEIL SYSTEMS).

Measurement location : Giheung SGS Korea, 4th floor semiconductor test and analysis laboratory.

Equipment : HITACHI SEM (Model : SU8010)

Measurement conditions: Vibrations were measured on the MB1000 tabletop and the laboratory floor respectively.

Vibration environment measurement results are shown as VC-CLASS. (Attachment 1)

Built-in program transmissibility plots are included to verify isolation performance. (Attachment 2)

SEM images were acquired to confirm isolation effectiveness. (Attachment 3)

The site exhibits substantial floor vibration, with particularly strong low-frequency horizontal energy.

With the platform installed, the floor slab measured VC-Class Z-axis B-Class, X-axis D-Class, and Y-axis C-Class.

Above the platform top, readings were VC-Class Z-axis E-Class, X-axis F-Class, and Y-axis E-Class.

After isolation installation, imaging was confirmed favorable and the end user was satisfied.

On the built-in program, levels are favorable at approximately −30 dB (Z-axis), −32 dB (X-axis), and −35 dB (Y-axis) referenced at 10 Hz.