Dongjin Semichem Incheon Hitachi SU8010 DVIA-MB1000 (MB1000 P21) vibration environment measurement — 2016-07-04

Field visit date: 2016.07.01 (Fri)

Report date: 2016.07.04 (Mon)

Field staff: Kim Du-hyeon (Deputy Manager), Lim Jong-wook (Assistant Manager), DAEIL SYSTEMS

After installing the vibration isolation platform, the vibration environment was measured to confirm there are no issues for equipment use.

Measurement date: 2016. 07. 01 (Fri), Measured by: Lim Jong-wook (Assistant Manager), DAEIL SYSTEMS

Measurement site: Dongjin Semichem Incheon factory

Equipment model: HITACHI SEM ( SU8010 )

Measurement condition: The MB1000 top surface and the building floor were measured.

Overall performance is favorable in all directions.

VC-Class graphs and built-in program transmissibility are attached.