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Installation Report
DVIA-M Series
12-28-2016

Hankook Tire Technodome Hitachi SU8010 DVIA-MB1000 (P38) vibration environment measurement — 2016.12.28

DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P38
Hankook Tire
Hitachi
SEM
SU8010
Daejeon
Technodome

Hankook Tire MB1000_P38 vibration environment measurement

(Customer)

Hankook Tire

Target equipment: HITACHI SEM SU8010

Trip date2016.12.27 (Tuesday)
Report written2016.12.28 (Wednesday)
Field engineersKim Duhyun (Deputy Manager), Lim Jongwook (Senior Engineer), DAEIL SYSTEMS

Overview

Following installation of the active vibration isolation system, vibration environment measurements were conducted to verify that laboratory operation raises no usability issues.

Measurement date: 2016. 12. 27 (Tuesday), Measuring technician: Lim Jong-wook (Senior Engineer), DAEIL SYSTEMS

Measurement location: Hankook Tire Technodome, Daejeon, 1st floor research building

Equipment model: HITACHI SEM (SU8010)

Measurement conditions and results

Measurement conditions: Responses were measured on the isolation table top slab and on the slab floor of the R&D annex.

Summary of measurement results

Test ConditionVC-Class ZVC-Class XVC-Class Y
Building floorA (36.9 µm/s)D (5.1 µm/s)D (5.4 µm/s)
Isolation table topF (1.3 µm/s)G (0.4 µm/s)G (0.4 µm/s)

The isolated floor slab supporting the workstation measured VC-Class A on the vertical axis and VC-Class D on both horizontal axes. The tabletop above the isolator logged VC-Class F on the vertical axis and VC-Class G on both horizontal axes—performance regarded as excellent, with VC-Class plots attached.

Measurements will be repeated with the adjacent annex floor active while large metrology loads run next door so the platform may be returned for tuning; a follow-up trip is planned for January 3, 2017.

VC-Class vibration-environment graphs

Vertical axis (Z) vibration level - VC-Class

Horizontal axis (X) vibration level - VC-Class

Horizontal axis (Y) vibration level - VC-Class

Internal program transmissibility

Vertical axis (Z) vibration level - internal program

Horizontal axis (X) vibration level - internal program

Horizontal axis (Y) vibration level - internal program

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm line widths.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date12-28-2016
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P38
Hankook Tire
Hitachi
SEM
SU8010
Daejeon
Technodome