Hitachi SU8010 DVIA-MB1000 (MB1000 P15) vibration environment measurement — Seoul National University of Science and Technology — 2016-01-12
Contents
MB1000 P15 vibration environment measurement result (Seoul National University of Science and Technology)
Report date (file): 2016-01-12
Measurement date: 2016. 01. 11 (Monday)
Measured by: Lim Jong-wook (Assistant Manager), DAEIL SYSTEMS
Measurement site: Hyeseong Hall, 2nd floor electron microscopy laboratory, Seoul National University of Science and Technology
Equipment model: HITACHI SEM — SU8010
Equipment installation photograph
Overview
After installing the vibration isolation platform, the vibration environment was measured to verify there were no usability issues.
Measurement date: 2016. 01. 11 (Mon), Measurer: Assistant Manager Lim Jong-wook, DAEIL SYSTEMS
Measurement site: Hyeseong Hall, 2nd floor electron microscopy laboratory, Seoul National University of Science and Technology
Equipment: HITACHI SEM (model: SU8010)
Measurement conditions and results
Measurement condition: The MB1000 top plate and the laboratory floor were each measured separately.
The vibration-environment results are shown as VC-Class (attachment set 1).
To verify isolator performance, the built-in program transmissibility is shown (attachment set 2).
Summary of measurement results
| Test condition | VC-Class Z | VC-Class X | VC-Class Y |
|---|---|---|---|
| Floor | B | E | D |
| Above isolation platform top | F | F | F |
The installed floor measured as Z-axis Class B, X-axis Class E, and Y-axis Class D.
The top of the isolation platform measured as Class F on Z, X, and Y respectively.
After installing the vibration isolation platform, image measurement results were favorable.
At 10 Hz, built-in-program results were favorable at roughly −30 dB in all directions.
Vibration environment VC-CLASS graphs
Z axis vibration level
X axis vibration level
Y axis vibration level
Built-in program transmissibility
Z axis (built-in program)
Z axis — Transmissibility
Z axis — Autospectrum (table)
X axis (built-in program)
X axis — Transmissibility
X axis — Autospectrum (table)
Y axis (built-in program)
Y axis — Transmissibility
Y axis — Autospectrum (table)
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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