Case Studies
DAEIL SYSTEMS engineers active vibration isolation systems for the world's most demanding nanoscale imaging and metrology environments.
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All Case Studies
Banwol Hi-Tech 4F — Daeil Analysis Research Institute — DVIA-M1000 (M1000 P10) vibration survey — 2015-02-12
Post-installation vibration survey for an M-1000 P10 platform with TESCAN equipment at Daeil Systems’ Banwol Hi-Tech site (Daeil Analysis Research Institute, 4F). Includes measurement conditions, VC-class summary table, VAAV program FFF Z/X/Y plots, and measurement-setup capture. Active Z/X/Y 1/3 octave material exists only as vector charts in the issuance handout; no separate raster figures are published here.
Seoul National University — M-1000 P3 vibration environment measurement after service (ZEISS equipment, 2015-01-27)
Vibration environment worksheet for the M-1000 P3 isolation platform at the Seoul National University Precision Machine Interdisciplinary Research Building, after addressing a controller-down incident. Carl Zeiss equipment was operating; sensors on the platform top (front) and floor (front base). Publishes the VC-class summary table, one site measurement photo, Octave Band headings as in the source (no embedded plots in the Word file), and the §4 work log covering controller reset and checks.
Zeiss SUPRA 55 DVIA-M1000 P2 Vibration Environment Results — Bruker Relocation Installation (2015)
Vibration-environment measurement after M-1000 P2 relocation for Bruker-hosted Zeiss SUPRA 55 at the Trade Infocom Center 4F: summary VC table plus VAAV program FFT results (FFF Z/X/Y), then 1/3 Octave RMS plots (Active Z/X/Y). Reference uses the standard Generic VC criteria markdown table.
DVIA-M1000 P9 vibration environment measurement — Incheon Production Technology Institute — 2015-01-05
Handout dated 5 January 2015 for an FEI Nova Nano SEM 450 installed on an M-1000 P9 platform at Incheon Production Technology Institute: measurement conditions, a site equipment photograph from the handout, VC-Class summary table on floor versus active top surface, three VAAV “FFF” plots (Z/X/Y), and Active Z/X/Y 1/3-octave velocity spectra reproduced from the Word chart data embedded in the file (formal approval block at the top omitted). No Reference VC artwork section appears in this document.
Hanyang University M-1000 P8 vibration environment survey — 2014-12-29
Vibration environment survey for the M-1000 P8 platform at Hanyang University (FTC Building, 2F): FEI SEM load with passive/internal setup only, VC-Class summary (ACTIVE state) for Z/X/Y at Base and Top, narrative notes from the result summary, and VAAV program captures for Passive and FFF axes. OCTAVE BAND and Active Z/X/Y sections appear in the issued form without embedded plots.
Hanyang University FEI SEM DVIA-MB1000 (MB1000 P8) vibration environment measurement — 2014-12-29
2014 workbook for MB1000 program P8 measuring vibration environment versus VC-Class criteria for an FEI SEM at Hanyang University College of Engineering (2014-12-29, Choi Sung-won). The Word-first-paragraph raster banner was omitted per DOCX §2a; published figures follow §2a order: VC-Class summary graphic immediately after the measurement-position paragraph, then Active Z/X/Y octave-band plots under OCTAVE BAND.