Hitachi SEM SU3500 DVIA-MB1000 (MB1000 P12) China business trip worksheet — 2016.04.08

SU3500 ( HITACHI SEM )

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Choi, Hyoung Mun, Lim, Jong-wook / 16.04.05 ~ 16.04.07

2016.04.08

16.04.05

Depart and arrive at the installation site

Passive setup (cable dressing)

16.04.06

Active setup

Review equipment images

Measure the vibration environment and support the customer

16.04.07

Consultation on installation solutions for JEOL 2100F and FEI TEM equipment

Return

Good omnidirectional performance. (See Attachment 1.)

Floor vibration environment measured as vertical C-Class; horizontal X as C-Class and horizontal Y as D-Class.

On the active isolation top surface, vertical is G-Class and horizontal X is F-Class and Y is G-Class, with good overall performance. (See Attachment 2.)

Equipment images were captured to confirm isolation behaviour. (See Attachment 3.)

The customer is highly satisfied.

Coordination with NEMO on the Active installation was carried out. (See Attachment 4.)

The installation location is on an access floor.

DAEIL, YIMO, and the end user will coordinate to carry out floor civil work.

Outcomes from coordination with NEMO during the China visit (04/07) are as follows:

⇒ In Figure 1, the blue/teal boxes denote the overall footprint including the equipment and desks; the red box is the area requiring isolation.

⇒ The team will propose installing DAEIL MB1000 within the red-box area in Figure 1, or alternatively installing with a support frame and isolation platform as illustrated in Figure 2, depending on the customer’s preference, with further coordination to follow.

Figure 3 shows the TMC solution; the customer wants a frame of that form.

Following discussion with NEMO, the team will propose fabricating a frame as in Figure 4 (red outline) to the customer.

Input from the design team will be required.