Installation Report
DVIA-M Series
01-16-2017
FEI Teneo LoVac DVIA-MB1000 (MB1000 P33) China trip report — 2017.01.16
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P33
FEI
Teneo LoVac
SEM
China
Contents
중국 출장 보고서 (MB1000_P33 Set up)
Target equipment
타겟 장비 : Teneo LoVac ( FEI )
Business trip
출장일: 17.01.11 ~ 17.01.14
Operator
출장자: 최형문 대리, 임종욱 주임
Report written date
작성일: 2017.01.16
Installation summary
| ACTIVE | Test Direction | Base | Top |
|---|---|---|---|
| ACTIVE | Z | C | G |
| X | E | G | |
| Y | E | G |
전 방향 성능 양호.
SEM가동 전 셋업을 진행하였으며, 추후 SEM가동 시 이미지는 NEMO를 통해 피드백 받기로 함.
MB1000 internal program performance measurement result
Z axis (MB1000 internal program)
X axis (MB1000 internal program)
Y axis (MB1000 internal program)
Vibration environment measurement results
Z axis (octave band)
X axis (octave band)
Y axis (octave band)
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Case Study Information
Category
Installation Report
SeriesDVIA-M Series
Date01-16-2017
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P33
FEI
Teneo LoVac
SEM
China
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