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Installation Report
DVIA-M Series
07-14-2020

FEI NOVA450 DVIA-MB1000 (MB1000 P8) installation worksheet — Seoul Hanyang University — 2020-07-14

DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P8
FEI
NOVA450
SEM
Hanyang University
Seoul
Republic of Korea
2020

FEI NOVA450 - 서울 한양대학교

(MB1000_ P8)

Target equipment

FEI NOVA450

Place of installation

서울 한양대학교 퓨전테크센터 2층

Remark

Good Performance

END USER

서울 한양대학교

Operator

Operator: Choi, Hyoung Mun

Date of setup

Date of setup : 20.07.14

Date of reporting

Date of reporting : 20.07.14

Date of business trip

Date of business trip : 17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date

Measurement date: 2020.07.14 (TUE),

Operator: Daeil System, Manager Choi, Hyoung Mun

Place of measurement

Place of measurement : 서울 한양대학교 퓨전테크센터 2층

Equipment Model

Equipment Model: FEI - NOVA450

Measurement conditions and results

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

Frequency Range : 0.7 ~ 200Hz

DAQ System : B&K PULSE 14 & LAN-XI Type 3056

Accelerometer : PCB PIEZOTRONICS 393B05

PULSE LabShop

Summary of measurement results

Test ConditionVC-ClassBaseTop
ACTIVEZAE
XCE
YBF

Good omnidirectional performance.

MB1000 internal program performance measurement result

MB1000 internal program Z axis

MB1000 internal program X axis

MB1000 internal program Y axis

Octave Band Result (BASE: Floor, TOP: Above Active)

Octave band Z axis

Octave band X axis

Octave band Y axis

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date07-14-2020
Tags
DVIA-M Series
Installation Report
DVIA-MB1000
MB1000
P8
FEI
NOVA450
SEM
Hanyang University
Seoul
Republic of Korea
2020