Hanyang University FEI SEM DVIA-MB1000 (MB1000 P8) vibration environment measurement — 2014-12-29
Contents
MB1000 P8 vibration environment measurement report (Hanyang University College of Engineering)
Overview
Purpose of verifying whether the vibration environment satisfies the customer's requirements after application of the MB1000 P8 vibration isolation platform.
Measurement date/time: 2014. 12. 29 (Monday) 15:30 — Measurer: Choi Sung-won.
Measurement site: Hanyang University College of Engineering.
4. Measurement conditions and results
Measurement state: FEI SEM installed; onboard equipment inactive (built-in passive and instrument functions off).
Planning to add acoustic enclosure and EMI cancellation equipment implies possible ambient changes afterward.
Measurements were carried out at the front-center of the vibration isolation tabletop and at the front floor (base), without shaker excitation.
VC-Class summary graphic
Summary of measurement results
| Measurement axis | Base | Passive | ACTIVE |
|---|---|---|---|
| Z | B | C | G |
| X | F | E | G |
| Y | F | E | G |
Satisfactory intrinsic performance of the vibration isolation platform.
Horizontal floor vibration favorable at Class F, while vertical is relatively high at Class B.
In active isolation, the tabletop vibration environment is favorable at Class G or above.
OCTAVE BAND
Active Z
Active X
Active Y
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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