Installation Report

DVIA-M Series

06-04-2020

FEI SEM DVIA-MB1000 Installation Report — MB1000 P142, SN 190916R4 (2020.06.04)

DVIA-M Series

Installation Report

FEI

SEM

DVIA-MB1000

DVIA-ML1000

MB1000

P142

190916R4

Equipment picture

Target equipment

FEI - SEM

Place of installation

N/A

Remark

Good Performance

END USER

N/A

Operator

Choi, HyoungMun

Date of setup

20.06.03

Date of reporting

20.06.04

Date of business trip

17.12.27~17.12.29

Overview

After Active mounting, measure the vibration environment to check that there is no problem in using the equipment.

Measurement date: 20.06.03 (WED),

Operator: Daeil System, Manager HyoungMun, Choi

Place of measurement : N/A

Equipment Model: FEI - SEM

Measurement conditions and results

Summary of measurement results

Test Condition	VC-Class Z	VC-Class X	VC-Class Y
Floor
Above Active

Good omnidirectional performance.

MB1000 internal program performance measurement result

Z axis

X axis

Y axis

Reference

Generic Vibration Criteria

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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