ZEISS EVO 18 SEM DVIA-MB1000 Installation
Overview
ZEISS EVO 18 SEM DVIA-MB1000 Installation
Contents
1. Measurement Details
Measurement Date: May 24, 2016
Measurement Devices:
LAN-XI Data Acquisition Hardware – Brüel & Kjær 3050-A-040 (Serial Number: 3050-111438)
Data Analysis Software – Brüel & Kjær PULSE LAB SHOP 14
Sensors – PCB Accelerometer Model: 393B05 (Serial Number: 48995, 40626)
Measurement Location: 1st Floor
Measurement Setup:
Bandwidth: 0 – 100 Hz
Lines: 400
Window: Hanning
Averaging: Fast Fourier Transform Spectrum Averaging
Amplitude Units: m/s²
Spectral Unit: RMS
2. Equipment Information
Manufacturer: ZEISS
Model: EVO 18 SEM
Floor Vibration Specification: The manufacturer specifies that allowable vibration values are less than 6 μm/s RMS up to 30 Hz and less than 12 μm/s RMS above 30 Hz.
Unless otherwise stated, requirements should be assumed to be in three orthogonal axes and in third octaves between 1Hz and 80Hz.
3. Vibration Isolation System Information
Model: DVIA-MB1000
| Specification | Value |
|---|---|
| Platform Dimensions | 1140 x 910 x 224 mm |
| Load Capacity | 500 - 1700 kg |
| Actuator | Electromagnetic Actuator |
| Maximum Actuator Force | Vertical: 40N, Horizontal: 20 N |
| Degrees of Freedom | 6 degrees |
| Active Isolation Range | 0.5 - 100 Hz |
| Vibration Isolation at 2 Hz | ≥90% |
| Vibration Isolation at 10 Hz | ≥99% |
| Input Voltage | AC100 - 240V / 50 - 60 Hz / 1A |
| Power Consumption | Maximum 110W, <50 W in normal operation |
| Operating Temperature | 5 - 50 °C |
| Operating Humidity | 20 - 90% |
| Required Air Pressure | ≥ 0.5 MPa (5 bar) |
4. Installation Photos
5. Summary
| Frequency Range | Floor Vibration Specification | Floor Vibration | On AVIS |
|---|---|---|---|
| 1 - 30 Hz (Z-axis) | 6 μm/s RMS | ✗ Fail | ✓ Pass |
| 1 - 30 Hz (X-axis) | 6 μm/s RMS | ✗ Fail | ✓ Pass |
| 1 - 30 Hz (Y-axis) | 6 μm/s RMS | ✗ Fail | ✓ Pass |
| Above 30 Hz (Z-axis) | 12 μm/s RMS | ✓ Pass | ✓ Pass |
| Above 30 Hz (X-axis) | 12 μm/s RMS | ✓ Pass | ✓ Pass |
| Above 30 Hz (Y-axis) | 12 μm/s RMS | ✓ Pass | ✓ Pass |
6. Results
Z-axis (Vertical)
X-axis (Left to Right)
Y-axis (Front to Back)
7. Results – Vibration Isolation Effects on Imaging
8. Reference
Generic Vibration Criteria
*Notes:*
1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
2. Detail size refers to width in microelectronics fabrication or particle size in medical research.
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