China business trip report — MB1000 P17 setup, T56 service, and T78 / Newport measurements (May 2016)

China business trip report

(MB1000_P17 Set up / T56 service / T78 measurement)

16.05.23 — Departure; visit Shanghai Optics. T56_150kg inspection and coordination.

16.05.24 — MB1000_P17 setup with WOJIN group. Confirmed tool images. Vibration-environment measurement and customer support.

16.05.25 — Visit University of Science and Technology. Performance measurement of T78 and Newport products.

16.05.26 — Visit NEMO office: training and coordination on the T56 tuning program. Meeting with Shanghai Optics representative. Return travel.

Performance was satisfactory in all directions.

The floor vibration environment was measured as vertical C Class, horizontal X D Class, and horizontal Y C Class.

With active control, the isolator top-plate vibration environment was satisfactory at vertical F Class, horizontal X E Class, and horizontal Y E Class.

Equipment images were acquired to confirm that isolation was functioning properly.

Inspection results

Isolation performance was in good condition; no defects observed.

Shanghai Optics reported image instability and requested NEMO to perform an inspection.

The inspection suggested image instability due to a cause other than floor vibration.

Shanghai Optics, NEMO, and related parties held a meeting; the Shanghai Optics representative was satisfied with isolator performance.

Visited University of Science and Technology and measured T78 performance.

At the customer’s request, measured and compared performance of the previously installed Newport system.

The customer was very satisfied with T78 performance.