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Installation Report
DVIA-M Series
09-11-2015

KRICT Building 10 L3 EMI room DVIA-MB3000 vibration environment measurement (September 2015)

DVIA-M Series
Installation Report
DVIA-MB3000
KRICT
Korea Research Institute of Chemical Technology
Vibration measurement
Building 10
Electron microscopy laboratory
September 2015

Overview

After installing the vibration isolation platform, vibrations were measured to verify that equipment operation would not be affected.

Measurement date and measurement site

Measurement date: 2015. 9. 10 (Thursday), personnel: Sung Won Choi, Daeil Systems

Measurement site: Korea Research Institute of Chemical Technology — Building 10, 3rd floor, electron microscopy laboratory

Measurement conditions and results

Measurement conditions: The measurement positions are indicated by arrows in the figure below. The top plate of the MB3000 platform and the laboratory floor were measured separately. Results are expressed in VC-CLASS.

Measurement locations (floor BASE and platform TOP)

Summary of measurement results

Measurement siteZXY
FloorCEE
Isolation top plateFFF

Horizontal vibration levels across the axes are generally low on the floor. For the vertical axis, floor vibration is favorable below 10 Hz while levels are somewhat higher at and above 10 Hz.

With the vibration isolation applied, vibration levels at the isolation top plate are VC Class F in all measured directions and satisfy the equipment allowable requirement (VC Class E or better).

VC-CLASS vibration environment graphs

Vertical-axis (Z) vibration level

Horizontal-axis (X) vibration level

Horizontal-axis (Y) vibration level

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)
Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date09-11-2015
Tags
DVIA-M Series
Installation Report
DVIA-MB3000
KRICT
Korea Research Institute of Chemical Technology
Vibration measurement
Building 10
Electron microscopy laboratory
September 2015