Tier-1 Semiconductor Giheung SIX-3001 DVIA-P7000 Installation Report

DVIA-P Series

Installation Report

Tier-1 Semiconductor

SIX-3001

DVIA-P7000

Overview

The DVIA-P7000 active vibration isolation platform is appropriately installed and functioning as intended.

Model: DVIA-P7000

Serial Number: 230825R1

Youngha Lee from DAEIL SYSTEMS

December 04, 2023

December 08, 2023

December 27, 2017 – December 29, 2017

Tier-1 Semiconductor 5Line C/R, Giheung

Tier-1 Semiconductor

Manufacturer: N/A

Equipment: Micro focus X-ray inspection system

Model: SIX-3001

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A