Tier-1 Semiconductor Icheon Applied Materials PROVision 10 DVIA-P7000 Installation Report

Tuning and vibration measurement were performed on the DVIA-P7000 installed at Tier-1 Semiconductor Icheon Campus M16 10th floor C2 bay 6MHTC201.

Tuning and vibration measurement were conducted with the equipment Turned off.

Data are presented as VC Curves, along with reference materials for vibration level assessment.

Model: DVIA-P7000

Serial Number: 251027R7

Chaewon Lee from DAEIL SYSTEMS Field Engineering, Sungyun Jung from Development Team

January 20, 2026

Tier-1 Semiconductor Icheon Campus M16 10th floor C2 bay (6MHTC201)

Tier-1 Semiconductor

Manufacturer: Applied Materials

Equipment: 3E eBeam Metrology

Model: PROVision 10

장비 제진대 위에 안착 및 Turned off

10.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

Software: SignalCalc ACE

10.2) Accelerometer

PCB Accelerometer

Model: 393B05

F Span: 200 Hz

Lines: 3200

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

After equipment installation was completed, the mechanical installation condition of the vibration isolation platform was inspected, and basic utility configuration required for platform operation—including facility air (CDA) and power cabling—was carried out.

After verifying sensor and actuator signal states, initial control parameter setup and first-pass tuning suited to the site environment were performed.

Under DVIA-P7000 Active On conditions, it was finally confirmed that the equipment-required vibration specification is satisfied in all directions.

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospecturm

Front to Back Transmissibility