Tier-1 Semiconductor Icheon R3 Applied Materials PROVision 10 DVIA-P7000 Installation Report
Contents
Overview
A vibration-related alarm occurred on the upper tool installed on the DVIA-P7000 at Tier-1 Semiconductor Icheon R3, and an inspection was performed.
DVIA-P7000 tuning and vibration measurement were performed.
Data are presented as VC curves, along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P7000
Serial Number: 240502R3
Engineer
Chaewon Lee from DAEIL SYSTEMS
Inspection Date
January 13, 2026
Installation Site
Tier-1 Semiconductor Icheon campus R3
End User
Tier-1 Semiconductor Icheon M10B R3 Line
Equipment
Manufacturer: Applied Materials
Equipment: 3E eBeam Metrology
Model: PROVision 10
Equipment specification
Equipment Status
장비 제진대 위에 안착 및 Turned on/IDLE
Measuring Equipment
Data Physics DAQ
Hardware: QUATTRO, Serial Number: 22436
Software: SignalCalc ACE
Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Conclusion
The inspection found that a Gain setting among the isolator control parameters was excessively applied, reducing control stability and isolation performance. Gain parameters were readjusted considering Gain Margin and Phase Margin; after retuning, the isolator was confirmed to operate stably under normal control.
After retuning, no vibration-related alarms were observed under Applied Materials tool running conditions.
Under DVIA-P7000 Active On conditions, the tool vibration specification was confirmed to be met in all directions.
Measurement Data
| Measuring Point | Status | Direction | Spec | Measurement Data | Result | ||
|---|---|---|---|---|---|---|---|
| Floor vibration | DVIA-P7000 | Floor vibration | DVIA-P7000 | ||||
| Tier-1 Semiconductor Icheon R3 1. Floor vibration 2. DVIA-P7000 | N/A | Vertical | VC-D | VC-C @ 8 Hz | VC-E @ 8 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-D | VC-C @ 12.5 Hz | VC-D @ 12.5 Hz | ✗ FAIL | ✓ PASS | ||
| Front to Back | VC-D | VC-D @ 63 Hz | VC-F @ 63 Hz | ✓ PASS | ✓ PASS | ||
Data and Image
Vertical VC Curves
Vertical Transmissibility
Left to Right VC Curves
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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