Tier-1 Semiconductor Icheon Applied Materials PROVision 10 DVIA-P7000 Installation Report
Contents
Overview
Tuning and vibration measurement were performed on the DVIA-P7000 installed at Tier-1 Semiconductor Icheon R4 36 bay (RMHT3601).
Tuning and vibration measurement were conducted with the equipment Turned off.
Data are presented as VC curves, along with reference materials for vibration levels.
Vibration Isolation System Information
Model: DVIA-P7000
Serial Number: 251027R8
Engineer
Chaewon Lee, DAEIL SYSTEMS Field Engineer; Seongyun Jeong, Development Team
Inspection Date
January 22, 2026
Installation Site
Tier-1 Semiconductor Icheon R4 36 bay (RMHT3601)
End User
Tier-1 Semiconductor
Equipment
Manufacturer: Applied Materials
Equipment: 3E eBeam Metrology
Model: PROVision 10
Equipment Specification
Equipment Status
Equipment is mounted on the vibration isolation platform and Turned off
Measuring Equipment
10.1) Brüel & Kjær LAN-XI DAQ Type 3040 DAQ
Hardware: B&K Front End Type 3040-A-040
Software: B&K Pulse Labshop 22 Version
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Conclusion
After installation, the mechanical installation condition of the vibration isolation system was inspected, and basic utilities required for platform operation were configured through CDA and power connections.
Sensor and actuator signal status was checked, and initial control parameters suited to the site environment were applied for the first tuning.
Under DVIA-P7000 Active On conditions, the equipment vibration specification was confirmed to be satisfied in all directions.
Measurement Data
| Measuring Point | Equipment Status | Direction | Vibration Specification | Measurement (floor) | Measurement (DVIA-P7000) | Result (floor) | Result (DVIA-P7000) |
|---|---|---|---|---|---|---|---|
| Tier-1 Semiconductor M16 10F C2 bay (6MHTC201) 1. Floor vibration measurement 2. DVIA-P7000 | Equipment is mounted on the vibration isolation platform and Turned off | Vertical | VC-D | VC-B @ 100 Hz | VC-E @ 100 Hz | ✗ FAIL | ✓ PASS |
| Left to Right | VC-C @ 50 Hz | VC-G @ 50 Hz | ✗ FAIL | ✓ PASS | |||
| Front to Back | VC-E @ 63 Hz | VC-G @ 63 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospectrum
Front to Back Transmissibility
Reference
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8–80 Hz, VC-C through VC-G from 1–80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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