Tier-1 Semiconductor Icheon Campus R3 Applied Materials PROVision 10 DVIA-P7000 Installation Report
Contents
Overview
A site visit was conducted after internal testing because several items failed during the ATR (Self Test) of the IDE active vibration isolation platform installed inside the upper equipment of the DVIA-P7000 installed at Tier-1 Semiconductor Icheon R3.
Tuning and vibration measurement were performed on the DVIA-P7000.
Data are presented as VC curves along with reference materials for vibration level assessment.
Vibration Isolation System Information
Model: DVIA-P7000
Serial Number: 240502R3
Engineer
Sungyun Jung from DAEIL SYSTEMS
Inspection Date
December 23, 2025
Installation Site
Tier-1 Semiconductor Icheon Campus R3
End User
Tier-1 Semiconductor Icheon M10B R3 Line
Equipment
Manufacturer: Applied Materials
Equipment: 3E eBeam Metrology
Model: PROVision 10
Equipment specification
Equipment Status
장비 제진대 위에 안착 및 Turned on/IDLE
Measuring Equipment
10.1) Brüel & Kjær LAN-XI DAQ Type 3050 DAQ
Hardware: B&K Front End Type 3050-A-040
Software: B&K Pulse Labshop 22 Version
10.2) Accelerometer
PCB Accelerometer
Model: 393B05
Measuring Set-up
F Span: 200 Hz
Lines: 3200
Averaging: Spectrum Averaging
Engineering Units: m/s
Window: Hanning
Overlap: Max
Conclusion
With DVIA-P7000 Active On, vibration specifications are met in all directions.
Measurement Data
| Measuring site | Spec | Direction | Floor | DVIA-P7000 | Floor | DVIA-P7000 |
|---|---|---|---|---|---|---|
| Tier-1 Semiconductor Icheon R3 1. Floor 2. DVIA-P7000 | VC-D | Vertical | VC-D @ 63 Hz | VC-E @ 14 Hz | ✓ PASS | ✓ PASS |
| Tier-1 Semiconductor Icheon R3 1. Floor 2. DVIA-P7000 | VC-D | Left to Right | VC-C @ 14 Hz | VC-D @ 14 Hz | ✗ FAIL | ✓ PASS |
| Tier-1 Semiconductor Icheon R3 1. Floor 2. DVIA-P7000 | VC-D | Front to Back | VC-D @ 40 Hz | VC-E @ 14 Hz | ✓ PASS | ✓ PASS |
Data and Image
Vertical VC Curves
Vertical Autospectrum
Vertical Transmissibility
Left to Right VC Curves
Left to Right Autospectrum
Left to Right Transmissibility
Front to Back VC Curves
Front to Back Autospecturm
Front to Back Transmissibility
Reference
Generic Vibration Criteria
Notes:
1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.
2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.
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