Tier-1 Semiconductor Giheung SIX-3001 DVIA-P7000 Measurement Report
Contents
Overview
After the equipment mounted on the DVIA-P7000 was turned on, X, Y, and Z axis vibration spectra were measured at three requested locations and converted to VC curves.
Prepared by
Engineer: Youngha Lee
Measurement date: 23.12.20
Report written date: 24.01.02
Date of business trip : 17.12.27~17.12.29
System Information
Model: DVIA-P7000
Serial Number: 230825R1
Engineer
Youngha Lee from DAEIL SYSTEMS
Measurement Date
December 20, 2023
Location
Tier-1 Semiconductor 5Line C/R, Giheung
Equipment
SIX-3001(Micro focus X-ray inspection system)
Summary of Vibration Results
| Measurement Point | Z-axis (Vertical) 1-10 Hz | Z-axis (Vertical) 12.5-80 Hz | X-axis (Left to Right) 1-10 Hz | X-axis (Left to Right) 12.5-80 Hz | Y-axis (Front to Back) 1-10 Hz | Y-axis (Front to Back) 12.5-80 Hz |
|---|---|---|---|---|---|---|
| DVIA-P7000 | C | C | D | C | E | D |
| Spot 1 (Stage) | C | B | D | C | B | C |
| Spot 2 (LP 1) | Operating Theatre (ISO) | A | Residential Area (ISO) | Residential Area (ISO) | D | A |
| Spot 3 (LP 2) | A | B | Office (ISO) | Residential Area (ISO) | A | Operating Theatre (ISO) |
Data and Image
DVIA-P VC curves
DVIA-P VC curves (23.12.04 장비 Turn off 상태 측정 Data)
Z axis
X axis
Y axis
On 2023. 12. 04 with the equipment Turn off, X, Y, and Z on the DVIA-P top plate were at or below VC-E across 1–80 Hz.
On 2023. 12. 20 with the equipment Turn on, vibration increased in the 10 Hz band and the 20–30 Hz band.
Spot 1 - Stage 상단 측정 부 VC curves
The measurement point is above the pad and the equipment was Turn on, so vibration in the 10 Hz and 30 Hz bands was relatively high.
Spot 2 – LP1 Wafer 수령, 불출 부(좌)
The measurement point is at the tool edge, above the pad, with the equipment Turn on; vibration was relatively high in the 10 Hz, 30 Hz, and 60 Hz bands.
Spot 3 – LP2 Wafer 수령, 불출 부(우)
The measurement point is at the tool edge, above the pad, with the equipment Turn on; vibration was relatively high in the 10 Hz, 30 Hz, and 60 Hz bands.
Reference
Generic Vibration Criteria
Notes:
- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).
- Detail size refers to width in microelectronics fabrication or particle size in medical research.
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