Vibration Isolation Case Studies

DVIA-P2200 (241223R2) tuning and vibration measurement at LB Semicon Pyeongtaek P2 line with Nordson Auto Shear Integra 4800. VC, autospectrum, and transmissibility plots by axis.

DVIA-ML1000S installation report (serial 241008R1).

DVIA-M1000 installation report — Hitachi FE-SEM SU8600 (serial 240308R2) for Hefei University of Technology in Xuancheng, Anhui, China. Overview states the platform is appropriately installed and functioning as intended. The published handout has no vibration specification section and no measurement summary table. Equipment condition: The equipment is installed. Tuning request is a single dash in the source form. Published figures: UI-program Transmissibility (vertical, left to right, front to back), on-site equipment photo; Reference uses the standard Generic Vibration Criteria markdown table (no separate reference graphic).

UNIST Building 108 B1F Line JEOL JBX-8100FS electron beam lithography DVIA-P2200 tuning and vibration measurement with equipment Turned off. VC, narrowband, and transmissibility plots by axis.

DVIA-MO1000 installation report (serial 240930R7) for Epin STM in Shanghai, China; tuning January 14, 2025.

DVIA-M1000 serial 220121R3 — ZEISS Innovation Center handout for ZEISS Sigma 360 VP FE-SEM, installation and measurement in Shanghai. Overview and metadata match the published form; M1000 internal program performance plots labeled Vertical, Left to Right, and Front to Back from the UI program. Cover-only header graphics are not republished.