Vibration Isolation Case Studies

DVIA-M1000 installation report (serial 241108R3) — ZEISS FE-SEM Sigma 360. YIMO field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.

DVIA-T67 DEMO isolator with 150 kg spring tuning and vibration measurement at Korea Institute of Nano Technology 3F QRT lab — serial 241213R2, MSTech MST8500 probe station. Measurements conducted with isolator installed and equipment Turned on (per report). VC curves by axis, equipment photo, measurement summary table, and Reference Generic Vibration Criteria as markdown.

DVIA-UD350 (serial 220127R1-2) vibration inspection/tuning report at Korea Institute of Science and Technology Building L7, Room 222 for an Olympus BX51 microscope. Measurements taken with equipment turned off; VC curves, autospectra, and transmissibility for vertical/left‑to‑right/front‑to‑back; Dataphysics QUATTRO/SignalCalc ACE. Y1 sensor replacement noted. Decorative cover bitmap omitted; VC reference reproduced as markdown only.

DVIA-P4000 (serial 241202R4) tuning and vibration measurement at Tekscend Photomask CLB for a KLA KLA597XR Reticle Inspection System. Engineer Chaewon Lee (DAEIL SYSTEMS); measurement and report December 29, 2024; B&K LAN-XI DAQ and PCB 393B05. Equipment not installed at measurement time. Published vibration specification capture and vertical, left-to-right, and front-to-back velocity spectral density plots.

December 2024 DEMO shipment tuning and vibration report for DVIA‑T67 (serial 241213R2) at Korea Institute of Nano Technology 3F QRT lab — MSTech MST8500 probe station. Measurements with equipment Turned off; summary table cites Table vs DVIA‑T67; Brüel & Kjær Pulse Labshop acquisition; VC / Autospectrum / Transmissibility by axis plus equipment photo. Reference VC criteria as markdown only.

DVIA-M1000 installation report (serial 241010R2) — Self-made - -. YIMO field package. UI-program transmissibility plots and equipment photo; Reference as markdown VC table.