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Installation Report
DVIA-M Series
02-17-2025

YIMO China Rare Earth Guangxi Co., Ltd. ZEISS FE-SEM Sigma 360 DVIA-M1000 (240821R3) Installation Report

DVIA-M Series
Installation Report
YIMO
ZEISS
Sigma 360
FE-SEM
DVIA-M1000
240821R3

Contents

Overview

The DVIA-M1000 active vibration isolation platform is appropriately installed and functioning as intended.

Vibration Isolation System Information

Model: DVIA-M1000

Serial Number: 240821R3

Engineer

Chaewon Lee, Jonghwa Suh from DAEIL SYSTEMS

Tuning Date

February 17, 2025

Report written date

25.02.17

Number of Tuning Trial

1st

Location

Nanning, China

End User

China Rare Earth Guangxi Co., Ltd.

Equipment

Manufacturer: ZEISS

Equipment: FE-SEM

Model: Sigma 360

Equipment Condition

The equipment is installed/IDLE

Tuning Request

Data and Image

Vertical Transmissibility

Left to Right Transmissibility

Front to Back Transmissibility

Equipment photo

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

2. Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date02-17-2025
Tags
DVIA-M Series
Installation Report
YIMO
ZEISS
Sigma 360
FE-SEM
DVIA-M1000
240821R3

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