Vibration Isolation Case Studies

DVIA-MO1000 second tuning report (serial 240930R7) for Epin STM in Shanghai, China; tuning March 5, 2025 (2nd tuning).

DVIA-MB3000 active vibration isolation worksheet (serial 241017R1) for a JEOL F200 TEM at Fudan University, with measurements in Shanghai. Setup and reporting 2025.03.04; operators Chaewon Lee and Jonghwa Suh (DAEIL SYSTEMS). Published figures are MB3000 internal-program captures for Vertical, Left to Right, and Front to Back only; the Word raster under the *(MB3000_ 241017R1 Set up)* title block is omitted on the public page. No Reference / VC appendix is present in the source handout.

DVIA-MB3000 (serial 241021R4) setup worksheet at Fudan University with JEOL STEM ARM200 in Shanghai: operator and reporting dates 25.03.04, measurement date 2025.03.04 (Tuesday). Includes MB3000 internal program performance plots for vertical, left-to-right, and front-to-back directions.

DVIA-ML3000 installation report (serial 241021R4) at Fudan University for the JEOL STEM ARM200 in Shanghai. Tuning date March 4, 2025. Equipment condition documented as installed and turned off. The handout publishes a tuning-request capture plus vertical, left-to-right, and front-to-back transmissibility plots from the measurement UI, one on-site equipment photo, and Reference as the standard VC criteria markdown table (the reference figure is not republished).

DVIA-ML3000 active vibration isolation installation and vibration measurement summary for the Raith Voyager electron beam lithography system at POSTECH, including floor vs platform results and VC / autospectrum / transmissibility plots.

DVIA-M1000 installation report (serial 240726R3) for a ZEISS Crossbeam 550 FIB-SEM at a Tier-1 Semiconductor Onyang Line 4 research laboratory. The Korean handout Overview describes tuning and vibration measurement with the equipment in the Turned off state, VC-curve data presentation, and reference materials for vibration levels. Date of measurement February 12, 2025; report written February 24, 2025. Engineers Chaewon Lee and Jonghwa Seo. Equipment condition verbatim from the form: 장비 설치 및 Turned off. Vibration specification is the embedded program capture; Measurement Summary matches the table in the source; axis VC / Autospectrum / Transmissibility plots from the UI; onsite equipment photo; Reference is the standard Generic Vibration Criteria markdown table only (no separate reference figure).