Vibration Isolation Case Studies

DVIA-ML3000 active vibration isolation installation and vibration measurement summary for the Raith Voyager electron beam lithography system at POSTECH, including floor vs platform results and VC / autospectrum / transmissibility plots.

DVIA-M1000 installation report (serial 240726R3) for a ZEISS Crossbeam 550 FIB-SEM at a Tier-1 Semiconductor Onyang Line 4 research laboratory. The Korean handout Overview describes tuning and vibration measurement with the equipment in the Turned off state, VC-curve data presentation, and reference materials for vibration levels. Date of measurement February 12, 2025; report written February 24, 2025. Engineers Chaewon Lee and Jonghwa Seo. Equipment condition verbatim from the form: 장비 설치 및 Turned off. Vibration specification is the embedded program capture; Measurement Summary matches the table in the source; axis VC / Autospectrum / Transmissibility plots from the UI; onsite equipment photo; Reference is the standard Generic Vibration Criteria markdown table only (no separate reference figure).

DVIA-M1000 installation report (serial 240607R6) for ZEISS FE-SEM Sigma560 via YIMO. Overview matches the published form. Equipment condition: The equipment is installed/IDLE. Published figures include UI-program plots as listed; Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-U1000 compact installation worksheet (serial 240308R3) at Shenzhen BYD with ZEISS FE-SEM Sigma 360 in Shenzhen. Setup and reporting 25.02.20; operators Chaewon Lee and Jonghwa Suh from DAEIL SYSTEMS; business-trip line 17.12.27~17.12.29. Overview measurement dated 2025.02.20 (Thursday). Published installation photograph plus U1000 internal-program Vertical / Left to Right / Front to Back screenshots in Word segment order.

DVIA-M1000 installation report (serial 250131R1). Published figures: vertical-transmissibility, left-to-right-transmissibility, front-to-back-transmissibility. Reference uses the standard Generic Vibration Criteria markdown table.

DVIA-M1000 installation report (serial 241224R6). Published figures: vertical-transmissibility, left-to-right-transmissibility, front-to-back-transmissibility, equipment-picture-01. Reference uses the standard Generic Vibration Criteria markdown table.