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Installation Report
DVIA-ULF Series
03-26-2025

SpaceX Thermo Fisher Scientific FIB-SEM DVIA-U1000 Installation Report

DVIA-U Series
Installation Report
Thermo Fisher Scientific
SpaceX

Contents

Overview

The resonant frequency of the DVIA-U1000 is slightly higher than excpected. The performance is decent, but not as good as expected; the performance would be improved by adjusting the springs of DVIA-U1000.

Vibration Isolation System Information

Model: DVIA-U1000

Serial Number: 241204R5

Engineer

Sungyoon Jung from DAEIL SYSTEMS

Tuning Date

March 26, 2025

End User

SpaceX

Number of Tuning Trial

First tuning

Location

California, USA

Equipment

Manufacturer: Thermo Fisher Scientific

Equipment: FIB-SEM

Model: Quattro

Equipment Condition

The equipment is installed/IDLE

Data and Image

Spring Adjustment

Passive Transmissibility(Active Off)

Open-Loop Tuning

Transmissibility(Active On)

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

1. VC-A/B is measured in 1/3 octave bands from 8-80 Hz, VC-C through VC-G from 1-80 Hz.

2. Detail size refers to line widths in microelectronics manufacturing or particle sizes in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-ULF Series
Date03-26-2025
Tags
DVIA-U Series
Installation Report
Thermo Fisher Scientific
SpaceX

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