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Installation Report
DVIA-M Series
03-18-2025

DVIA-ML1000 (241223R3) Installation Report

DVIA-M Series
Installation Report
JEOL
JEOL Korea
DVIA-ML1000
241223R3

Contents

Overview

N/A

Vibration Isolation System Information

Model: DVIA-ML1000

Serial Number: 241223R3

Engineer

Jonghwa Suh

Tuning Date

25.03.18

Report written date

25.03.18

End User

Number of Tuning Trial

Number of Tuning Trial

1st

Location

N/A

Equipment

Manufacturer: N/A

Equipment: N/A

Model: DVIA-ML1000

Equipment Condition

The equipment was installed on the DVIA-ML1000 platform and turned on/IDLE

Measurement Summary

Measurement PointStatusVibration SpecificationAxisMeasurement Data
FloorDVIA-ML1000
10th floor, Korea Testing & Research InstituteTurned on/ IDLEN/AVerticalVC-B @16 HzVC-G @16 Hz
Left to RightVC-C @1 HzVC-G @1 Hz
Front to BackVC-C @1.25 HzVC-F @1.25 Hz

Data and Image

Vertical VC Curves

Vertical VC Curves

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Transmissibility

Reference

Generic Vibration Criteria

Criterion CurveDescriptionAmplitude
μm/s (µin/s)		Detail Size
μm
Workshop (ISO)Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.800 (32,000)N/A
Office (ISO)Perceptible vibration. Appropriate to offices and non-sensitive areas.400 (16,000)N/A
Residential Area (ISO)Barely perceptible vibration. Appropriate to sleep areas in most instances.200 (8,000)75
Operating Theatre (ISO)Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.100 (4,000)25
VC-AAdequate for optical microscopes to 400x, microbalances, optical balances.50 (2,000)8
VC-BAppropriate for inspection and lithography equipment to 3μm line widths.25 (1,000)3
VC-CAppropriate for optical microscopes to 1000x, lithography equipment to 1μm.12.5 (500)1 - 3
VC-DSuitable for demanding equipment including electron microscopes (SEMs/TEMs).6.25 (250)0.1 - 0.3
VC-EFor the most demanding systems including E-Beam lithography at nanometer scales.3.12 (125)< 0.1
VC-FFor extremely quiet research spaces. Not recommended as design criterion.1.56 (62.5)N/A
VC-GFor extremely quiet research spaces. Not recommended as design criterion.0.78 (31.25)N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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Case Study Information

Category
Installation Report
SeriesDVIA-M Series
Date03-18-2025
Tags
DVIA-M Series
Installation Report
JEOL
JEOL Korea
DVIA-ML1000
241223R3

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