Installation Report

DVIA-M Series

04-28-2026

Gedeon Richter JEOL SEM JSM-IT500HR DVIA-ML1000 (250829R1) Installation Report

DVIA-M Series

Installation Report

Gedeon Richter

JEOL

SEM

JSM-IT500HR

DVIA-ML1000

Vibration Isolation System Info

Model: DVIA-ML1000

Serial Number: 250829R1

Engineer

Chaewon Lee, Jonghwa Suh

Tuning Date

November 26, 2025

Report written date

December 1, 2025

End User

N/A

Number of Tuning Trial

1st

Installation Site

Gedeon Richter Laboratory

Equipment

Manufacturer: JEOL

Equipment: SEM

Model: JSM-IT500HR

Equipment Status

The equipment was installed on the DVIA-ML1000 platform. Turned on/IDLE

Tuning Request

N/A

Measurement Device

8.1) Data Physics DAQ

Hardware: QUATTRO, Serial Number: 22436

-Software: SignalCalc ACE

8.2) Accelerometer

PCB Accelerometer

Model: 393B05

Measurement Setup

Bandwidth: 625 Hz

Lines: 3200

Averaging: Spectrum Averaging

Engineering Units: m/s

Window: Hanning

Overlap: Max

Vibration specification

Conclusion

After the installation of the DVIA-ML1000, floor vibration was reduced to within the vibration specification in all axes.

Measurement Summary

Measurement Point	Status	Axis	Floor	DVIA-ML1000	Floor	DVIA-ML1000
Gedeon Richter Laboratory 1. Floor 2. DVIA-ML1000	Equipment is turned on/IDLE	Vertical	VC-C @ 25 Hz	VC-G @ 25 Hz	✗ FAIL	✓ PASS
Gedeon Richter Laboratory 1. Floor 2. DVIA-ML1000	Equipment is turned on/IDLE	Left to Right	VC-E @ 10 Hz	VC-G @ 10 Hz	✗ FAIL	✓ PASS
Gedeon Richter Laboratory 1. Floor 2. DVIA-ML1000	Equipment is turned on/IDLE	Front to Back	VC-E @ 10 Hz	VC-G @ 10 Hz	✓ PASS	✓ PASS

Data and Image

Vertical VC Curves

Vertical Autospectrum

Vertical Transmissibility

Left to Right VC Curves

Left to Right Autospectrum

Left to Right Transmissibility

Front to Back VC Curves

Front to Back Autospectrum

Front to Back Transmissibility

Reference

Criterion Curve	Description	Amplitude μm/s (µin/s)	Detail Size μm
Workshop (ISO)	Distinctly perceptible vibration. Appropriate to workshops and non-sensitive areas.	800 (32,000)	N/A
Office (ISO)	Perceptible vibration. Appropriate to offices and non-sensitive areas.	400 (16,000)	N/A
Residential Area (ISO)	Barely perceptible vibration. Appropriate to sleep areas in most instances.	200 (8,000)	75
Operating Theatre (ISO)	Vibration not perceptible. Suitable for surgical suites, microscopes to 100x.	100 (4,000)	25
VC-A	Adequate for optical microscopes to 400x, microbalances, optical balances.	50 (2,000)	8
VC-B	Appropriate for inspection and lithography equipment to 3μm line widths.	25 (1,000)	3
VC-C	Appropriate for optical microscopes to 1000x, lithography equipment to 1μm.	12.5 (500)	1 - 3
VC-D	Suitable for demanding equipment including electron microscopes (SEMs/TEMs).	6.25 (250)	0.1 - 0.3
VC-E	For the most demanding systems including E-Beam lithography at nanometer scales.	3.12 (125)	< 0.1
VC-F	For extremely quiet research spaces. Not recommended as design criterion.	1.56 (62.5)	N/A
VC-G	For extremely quiet research spaces. Not recommended as design criterion.	0.78 (31.25)	N/A

Notes:

- As measured in one-third octave bands over 8-80 Hz (VC-A/B) or 1-80 Hz (VC-C through VC-G).

- Detail size refers to width in microelectronics fabrication or particle size in medical research.

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